Optimisation of microlenses fabricated by deep proton irradiation and styrene diffusion

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 945-951

  Woo, H J ^a   Kim, Y S ^a   Choi, H W ^a   Hong, W ^a   Lee, S ^b   Kufner, M ^c   Kufner, S ^c  

^a Korea Institute of Geosceince and Mineral Resources   (South Korea)

^b Daejeon University   (South Korea)

^c INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

Microlenses; PMMA; Proton beam; Styrene diffusion; Swelling

Indexed keywords

CURING; DIFFUSION; FABRICATION; MASKS; OPTIMIZATION; PROTON IRRADIATION; STYRENE; SWELLING; ULTRAVIOLET RADIATION;

STYRENE DIFFUSION;

MICROLENSES;

EID: 0035450392     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00564-0     Document Type: Article

References (8)

1. Fabrication and characterization of microlenses realized by a modified LIGA process
2. Out-of-plane refractive microlens fabricated by surface micromachining
3. Fabrication of microlenses by plasmaless isotropic etching combined with plastic moulding
4. Microlens for efficient coupling between LED and optical fiber
5. Ink-jet fabrication of polymer microlens for optical I/O chip packaging
6. UV induced organic micro-lens array
7. Microlenses in PMMA with high relative aperture