Shaping light: MOEMS deformable mirrors for microscopes and telescopes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7595, Issue , 2010, Pages

  Bifano, Thomas ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

Adaptive optics; Deformable mirrors; MEMS; MOEMS

Indexed keywords

BIOLOGICAL MICROSCOPY; BOSTON UNIVERSITY; DEFORMABLE MIRRORS; FREE SPACE LASER COMMUNICATIONS; LARGE TELESCOPES; MICROMACHINED DEFORMABLE MIRRORS; MICROMACHINES; RETINAL IMAGING; WAVEFRONT ABERRATIONS;

ADAPTIVE OPTICS; DEFORMATION; DIAMONDS; MIRRORS; OPTICAL TELESCOPES;

MOEMS;

EID: 77951660433     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.848221     Document Type: Conference Paper

References (57)

1. Crampton D, Simard L, "Instrument concepts and scientific opportunities for TMT," Ground-based and Airborne Instrumentation for Astronomy, Orlando, FL, USA, SPIE, [6269], 62691T-62615, (2006).
2. Dekany RG, Britton MC, Gavel DT, Ellerbroek BL, Herriot G, Max CE, Veran J-P, "Adaptive optics requirements definition for TMT," SPIE Advancements in Adaptive Optics, Glasgow, Scotland, United Kingdom, SPIE, [5490], 879-890, (2004).
3. Evans JW, Morzinski K, Reza L, Severson S, Poyneer L, Macintosh BA, Dillon D, Sommargren G, Palmer D, Gavel D, Olivier S, "Extreme adaptive optics testbed: high contrast measurements with a MEMS deformable mirror," Techniques and Instrumentation for Detection of Exoplanets II, San Diego, CA, USA, SPIE, [5905], 59050Y-59058, (2005).
4. Evans JW, Morzinski K, Severson S, Poyneer L, Macintosh B, Dillon D, Reza L, Gavel D, Palmer D, Olivier S, Bierden P, "Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror," SPIE MEMS/MOEMS Components and Their Applications III, San Jose, CA, USA, SPIE, [6113], 61130I-61136, (2006).
5. Guyon O, Pluzhnik E, Martinache F, Totems J, Tanaka S, Matsuo T, Blain C, Belikov R, "High-Contrast Imaging and Wavefront Control with a PIAA Coronagraph: Laboratory System Validation," Publications of the Astronomical Society of the Pacific, [122], 71-84, (2010).
6. Poyneer LA, Dillon D, Thomas S, Macintosh BA, "Laboratory demonstration of accurate and efficient nanometer-level wavefront control for extreme adaptive optics," Applied Optics, [47], 1317-1326, (2008).
7. Severson SA, Bauman B, Dillon D, Evans J, Gavel D, Macintosh B, Morzinski K, Palmer D, Poyneer L, "The extreme adaptive optics testbed at UCSC: current results and coronagraphic upgrade," Advances in Adaptive Optics II, Orlando, FL, USA, SPIE, [6272], 62722J-62712, (2006).
8. Laag EA, Ammons SM, Gavel DT, Kupke R, "Multiconjugate adaptive optics results from the laboratory for adaptive optics MCAO/MOAO testbed," J. Opt. Soc. Am. A, [25], 2114-2121, (2008). (Pubitemid 44504365)
9. Ragazzoni R, Marchetti E, Valente G, "Adaptive-optics corrections available for the whole sky," Nature, [403], 54-56, (2000). (Pubitemid 30038515)
10. Tyler GA, "Adaptive optics compensation for propagation through deep turbulence: initial investigation of gradient descent tomography," J. Opt. Soc. Am. A, [23], 1914-1923, (2006).
11. Wong MH, Marchis F, Marchetti E, Amico P, Tordo S, Bouy H, Pater Id, "A shift in Jupiter's equatorial haze distribution imaged with the Multi-Conjugate Adaptive Optics Demonstrator at the VLT," 40th Annual Meeting of the Division for Planetary Sciences, Ithaca, NY, American Astronomical Society, (2008).
12. Arathorn DW, Yang Q, Vogel CR, Zhang Y, Tiruveedhula P, Roorda A, "Retinally stabilized cone-targeted stimulus delivery," Optics Express, [15], 13731-13744, (2007). (Pubitemid 47610548)
13. Biss DP, Sumorok D, Burns SA, Webb RH, Zhou YP, Bifano TG, Cote D, Veilleux I, Zamiri P, Lin CP, "In vivo fluorescent imaging of the mouse retina using adaptive optics," Optics Letters, [32], 659-661, (2007). (Pubitemid 46363468)
14. Burns SA, Zhou Y, Lin CP, Bifano TG, Veilleux I, Webb RH, "Retinal imaging and wavefront sensing in mice," Investigative Ophthalmology & Visual Science, [45], U1003-U1003, (2004).
15. Chui TYP, Song HX, Burns SA, "Adaptive-optics imaging of human cone photoreceptor distribution," Journal of the Optical Society of America a-Optics Image Science and Vision, [25], 3021-3029, (2008).
16. Doble N, Williams DR, "The application of MEMS technology for adaptive optics in vision science," Ieee Journal of Selected Topics in Quantum Electronics, [10], 629-635, (2004).
17. Evans JW, Zawadzki RJ, Jones SM, Olivier SS, Werner JS, "Error Budget Analysis for an Adaptive Optics Optical Coherence Tomography System," Optics Express, [17], 13768-13784, (2009).
18. Hammer DX, Ferguson RD, Bigelow CE, Iftimia NV, Ustun TE, Burns SA, "Adaptive optics scanning laser ophthalmoscope for stabilized retinal imaging," Optics Express, [14], 3354-3367, (2006).
19. Hammer DX, Iftimia NV, Bigelow CE, Ustun TE, Bloom B, Ferguson RD, Burns SA, "High resolution retinal imaging with a compact adaptive optics spectral domain optical coherence tomography system," Ophthalmic Technologies XVII, San Jose, CA, USA, SPIE, [6426], 64261Q-64210, (2007).
20. Liang J, Williams DR, Miller DT, "Supernormal vision and high-resolution retinal imaging through adaptive optics," J. Opt. Soc. Am. A, [14], 2884-2892, (1997). (Pubitemid 127573833)
21. Nguyen TT, Wang JJ, Wong TY, "Retinal Vascular Changes in Pre-Diabetes and Prehypertension: New findings and their research and clinical implications," Diabetes Care, [30], 2708-2715, (2007).
22. Romero-Borja F, Venkateswaran K, Roorda A, Hebert T, "Optical slicing of human retinal tissue in vivo with the adaptive optics scanning laser ophthalmoscope," Applied Optics, [44], 4032-4040, (2005). (Pubitemid 40971996)
23. Roorda A, Zhang YH, Duncan JL, "High-resolution in vivo imaging of the RPE mosaic in eyes with retinal disease," Investigative Ophthalmology & Visual Science, [48], 2297-2303, (2007). (Pubitemid 351261309)
24. Yoon MK, Roorda A, Zhang Y, Nakanishi C, Wong LJC, Zhang Q, Gillum L, Green A, Duncan JL, "Adaptive Optics Scanning Laser Ophthalmoscopy Images in a Family with the Mitochondrial DNA T8993C Mutation," Investigative Ophthalmology & Visual Science, [50], 1838-1847, (2009).
25. Zawadzki RJ, Cense B, Jones SM, Olivier SS, Miller DT, Werner JS, "Ultra-high-resolution optical coherence tomography gets adaptive-optic 'glasses'," Laser Focus World, [44], 55-+, (2008).
26. Zawadzki RJ, Cense B, Zhang Y, Choi SS, Miller DT, Werner JS, "Ultrahigh-resolution optical coherence tomography with monochromatic and chromatic aberration correction," Optics Express, [16], 8126-8143, (2008). (Pubitemid 351775022)
27. Zhong Z, Petrig BL, Qi X, Burns SA, "In vivo measurement of erythrocyte velocity and retinal blood flow using adaptive optics scanning laser ophthalmoscopy," Opt. Express, [16], 12746-12756, (2008).
28. Bouchez AH, Dekany RG, Angione JR, Baranec C, Bui K, Burruss RS, Crepp JR, Croner EE, Cromer JL, Guiwits SR, Hale DDS, Henning JR, Palmer D, Roberts JE, Troy M, Truong TN, Zolkower J, "Status of the PALM-3000 high-order adaptive optics system," Astronomical and Space Optical Systems, San Diego, CA, USA, SPIE, [7439], 74390H-74398, (2009).
29. Bifano TG, Johnson HT, Bierden P, Mali RK, "Elimination of stress-induced curvature in thin-film structures," Journal of Microelectromechanical Systems, [11], 592-597, (2002). (Pubitemid 35242065)
30. Bifano TG, Mali RK, Dorton JK, Perreault J, Vandelli N, Horenstein MN, Castanon DA, "Continuous-membrane surface-micromachined silicon deformable mirror," Optical Engineering, [36], 1354-1360, (1997). (Pubitemid 127655889)
31. Bifano TG, Perreault J, Mali RK, Horenstein MN, " Microelectromechanical deformable mirrors," Journal of Selected Topics in Quantum Electronics, [5], 83-89, (1999).
32. Cornelissen SA, Bierden PA, Bifano TG, Lam CV, "4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging," Journal of Micro/Nanolithography, MEMS and MOEMS, [8], 031308-031308, (2009).
33. Horenstein MN, Bifano TG, Mali RK, Vandelli N, "Electrostatic effects in micromachined actuators for adaptive optics," Journal of Electrostatics, [42], 69-81, (1997). (Pubitemid 127405893)
34. Mali RK, Bifano TG, Vandelli N, Horenstein MN, "Development of microelectromechanical deformable mirrors for phase modulation of light," Optical Engineering, [36], 542-548, (1997). (Pubitemid 127574652)
35. Perreault JA, Bifano TG, Levine BM, Horenstein MN, "Adaptive optic correction using microelectromechanical deformable mirrors," Optical Engineering, [41], 561-566, (2002).
36. Stewart JB, Bifano TG, Cornelissen S, Bierden P, Levine BM, Cook T, "Design and development of a 331-segment tip-tilt-piston mirror array for space-based adaptive optics," Sensors and Actuators a-Physical, [138], 230-238, (2007). (Pubitemid 47002256)
37. Stewart JB, Diouf A, Zhou YP, Bifano TG, "Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control," Journal of the Optical Society of America a-Optics Image Science and Vision, [24], 3827-3833, (2007). (Pubitemid 351325152)
38. Morzinski KM, Harpsoe KBW, Gavel DT, Ammons SM, "The open-loop control of MEMS: modeling and experimental results," SPIE MEMS Adaptive Optics, San Jose, CA, USA, SPIE, [6467], 64670G-64610, (2007).
39. Morzinski KM, Gavel DT, Norton AP, Dillon DR, Reinig MR, "Characterizing MEMS deformable mirrors for open-loop operation: high-resolution measurements of thin-plate behavior," MEMS Adaptive Optics II, San Jose, CA, USA, SPIE, [6888], 68880S-68812, (2008).
40. Curtis RV, Glenn T, Rodolphe C, Celia B, "Fast, Robust Parameter Estimation and Open-Loop Control of Point-Actuated, Continuous-Facesheet Deformable Mirrors," Adaptive Optics: Methods, Analysis and Applications, Optical Society of America, AOThD4, (2009).
41. Grigsby B, Lockwood C, Baumann B, Gavel D, Johnson J, Ammons SM, Dillon D, Morzinski K, Reinig M, Palmer D, Severson S, Gates E, "ViLLaGEs: opto-mechanical design of an on-sky visible-light MEMS-based AO system," Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation, Marseille, France, SPIE, [7018], 701841-1701812, (2008).
42. Gavel D, Severson S, Bauman B, Dillon D, Reinig M, Lockwood C, Palmer D, Morzinski K, Ammons M, Gates E, Grigsby B, "Villages: an on-sky visible wavelength astronomy AO experiment using a MEMS deformable mirror," MEMS Adaptive Optics II, San Jose, CA, USA, SPIE, [6888], 688804-688807, (2008).
43. Macintosh B, Graham J, Palmer D, Doyon R, Gavel D, Larkin J, Oppenheimer B, Saddlemyer L, Wallace JK, Bauman B, Evans J, Erikson D, Morzinski K, Phillion D, Poyneer L, Sivaramakrishnan A, Soummer R, Thibault S, Veran J-P, "The Gemini Planet Imager," Advances in Adaptive Optics II, Orlando, FL, USA, SPIE, [6272], 62720L-62712, (2006).
44. Macintosh B, Graham J, Palmer D, Doyon R, Gavel D, Larkin J, Oppenheimer B, Saddlemyer L, Wallace JK, Bauman B, Erikson D, Poyneer L, Sivaramakrishnan A, Soummer R, Veran JP, "Adaptive optics for direct detection of extrasolar planets: the Gemini Planet Imager," Comptes Rendus Physique, [8], 365-373, (2007).
45. Rao SR, Wallace JK, Samuele R, Chakrabarti S, Cook T, Hicks B, Jung P, Lane B, Levine BM, Mendillo C, Schmidtlin E, Shao M, Stewart JB, "Path length control in a nulling coronagraph with a MEMS deformable mirror and a calibration interferometer," MEMS Adaptive Optics II, San Jose, CA, USA, SPIE, [6888], 68880B-68889, (2008).
46. Levine M, Fanson J, "Advanced thermo-structural technologies for the NASA terrestrial planet finder mission," Structural Control & Health Monitoring, [13], 190-209, (2006). (Pubitemid 43266661)
47. Zipfel WR, Williams RM, Webb WW, "Nonlinear magic: multiphoton microscopy in the biosciences," Nature Biotechnology, [21], 1368-1376, (2003).
48. Theer P, Denk W, "On the fundamental imaging-depth limit in two-photon microscopy," J. Opt. Soc. Am. A, [23], 3139-3149, (2006). (Pubitemid 46023808)
49. Mertz J, "Nonlinear microscopy: new techniques and applications," Current Opinion in Neurobiology, [14], 610-616, (2004). (Pubitemid 39349622)
50. Marsh P, Burns D, Girkin J, "Practical implementation of adaptive optics in multiphoton microscopy," Opt. Express, [11], 1123-1130, (2003).
51. Leray A, Mertz J, "Rejection of two-photon fluorescence background in thick tissue bydifferential aberration imaging," Opt. Express, [14], 10565-10573, (2006). (Pubitemid 44706147)
52. Hovhannisyan VA, Su P-J, Dong CY, "Characterization of optical-aberration-induced lateral and axial image inhomogeneity in multiphoton microscopy," Journal of Biomedical Optics, [13], 044023-044026, (2008).
53. Helmchen F, Denk W, "Deep tissue two-photon microscopy," Nature Methods, [2], 932-940, (2005).
54. Debarre D, Wilson T, Booth MJ, "Adaptive optics for multiphoton microscopy," SPIE Multiphoton Microscopy in the Biomedical Sciences IX, San Jose, CA, USA, SPIE, [7183], 71831J-71838, (2009).
55. Baker KL, Stappaerts EA, Homoelle DC, Henesian MA, Bliss ES, Siders CW, Barty CPJ, "Interferometric adaptive optics for high-power laser pointing and wavefront control and phasing," Journal of Micro/Nanolithography, MEMS and MOEMS, [8], 033040-1033014, (2009).
56. Baker KL, Homoelle D, Utternback E, Stappaerts EA, Siders CW, Barty CPJ, "Interferometric adaptive optics testbed for laser pointing, wave-front control and phasing," Opt. Express, [17], 16696-16709, (2009).
57. Baker K, Stappaerts E, Gavel D, Wilks S, Tucker J, Silva D, Olsen J, Olivier S, Young P, Kartz M, Flath L, Kruelivitch P, Crawford J, Azucena O, "High-speed horizontal-path atmospheric turbulence correction using a large actuator-number MEMS spatial light modulator in an interferometric phase conjugation engine," Optics Letters, [29], 1781-1783, (2004).