Characterizing MEMS deformable mirrors for open-loop operation: High-resolution measurements of thin-plate behavior

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6888, Issue , 2008, Pages

  Morzinski, Katie M ^a,b   Gavel, Donald T ^a,b   Norton, Andrew P ^a,b   Dillon, Daren R ^a,b   Reinig, Marco R ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California at Santa Cruz   (United States)

Author keywords

Adaptive optics; Deformable mirrors; Hysteresis; MEMS; Open loop control

Indexed keywords

ACTUATORS; ADAPTIVE OPTICS; APPROXIMATION THEORY; HYSTERESIS; PLATES (STRUCTURAL COMPONENTS);

DEFORMABLE MIRRORS; OPEN-LOOP CONTROL;

MEMS;

EID: 41149093921     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.773555     Document Type: Conference Paper

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