The open-loop control of MEMS: Modeling and experimental results

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6467, Issue , 2007, Pages

  Morzinski, Katie M ^a,b   Harpsøe, Kennet B W ^a,b   Gavel, Don T ^a,b   Ammons, S Mark ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California Santa Cruz   (United States)

Author keywords

Adaptive optics; Deformable mirrors; MEMS; Open loop control

Indexed keywords

ADAPTIVE OPTICS; ALGORITHMS; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; MIRRORS; WAVEFRONTS;

DEFORMABLE MIRRORS; DM CONTROL ALGORITHMS; OPEN LOOP CONTROL; THIN PLATE EQUATIONS;

MEMS;

EID: 34248583303     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.710428     Document Type: Conference Paper

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