Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 24, Issue 12, 2007, Pages 3827-3833

  Stewart, Jason B ^a   Diouf, Alioune ^b   Zhou, Yaopeng ^b   Bifano, Thomas G ^b  

^a Boston University   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; MEMS; VOLTAGE CONTROL; WAVEFRONTS;

ANALYTICAL ELASTIC MODEL; ELECTROMECHANICAL MODEL; LARGE-AMPLITUDE WAVEFRONT CONTROL; OPEN-LOOP CONTROL; SURFACE SHAPE;

MIRRORS;

ALGORITHM; ARTICLE; ARTIFACT; ELASTICITY; ELECTRICITY; ELECTRODE; ELECTROMAGNETIC FIELD; ELECTRONICS; EQUIPMENT; FEEDBACK SYSTEM; INSTRUMENTATION; METHODOLOGY; MOTION; OPTICS; SENSITIVITY AND SPECIFICITY;

ALGORITHMS; ARTIFACTS; ELASTICITY; ELECTRODES; ELECTROMAGNETICS; ELECTROSTATICS; EQUIPMENT FAILURE ANALYSIS; FEEDBACK; MINIATURIZATION; MOTION; OPTICS; SENSITIVITY AND SPECIFICITY;

EID: 40149094637     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.24.003827     Document Type: Article

References (19)