4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 8, Issue 3, 2009, Pages

  Cornelissen, Steven A ^a   Bierden, Paul A ^a   Bifano, Thomas G ^a,b   Lam, Charlie V ^a  

^a BOSTON MICROMACHINES CORPORATION   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

Adaptive optics; Deformable mirror; MEMS; MEMS characterization; MEMS packaging; Wavefront correction

Indexed keywords

DEFORMATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; POLYSILICON;

DEFORMABLE MIRROR; DEFORMABLE MIRRORS; FILL FACTOR; FRAME RATE; HIGH CONTRAST IMAGING; HIGH SPEED DRIVES; MANUFACTURING PROCESS; MEMS CHARACTERIZATION; MEMS DEFORMABLE MIRROR; MEMS PACKAGING; POLYSILICON SURFACE-MICROMACHINING; SURFACE FINISHES; WAVEFRONT CORRECTION;

COMPOSITE MICROMECHANICS;

EID: 77951658932     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3158067     Document Type: Conference Paper

References (4)

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