Design and development of a 331-segment tip-tilt-piston mirror array for space-based adaptive optics

Sensors and Actuators, A: Physical

Volumn 138, Issue 1, 2007, Pages 230-238

  Stewart, Jason B ^a   Bifano, Thomas G ^b,c   Cornelissen, Steven ^c   Bierden, Paul ^c   Levine, B Martin ^d   Cook, Timothy ^e  

^a Boston University   (United States)

^b BOSTON UNIVERSITY   (United States)

^c BOSTON MICROMACHINES CORPORATION   (United States)

^d CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^e Boston University   (United States)

Author keywords

Adaptive optics; Amplitude correction; Coronagraph; Deformable mirror; MEMS; Phase correction

Indexed keywords

ADAPTIVE OPTICS; EPITAXIAL GROWTH; IMAGE QUALITY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NASA; POLYSILICON;

AMPLITUDE CORRECTION; CORONAGRAPH; DEFORMABLE MIRRORS; PHASE CORRECTION;

MIRRORS;

EID: 34347236862     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.04.051     Document Type: Article

References (12)

1. Terrestrial Planet Finder Web Page: http://planetquest.jpl.nasa.gov/TPF/tpf_index.cfm, 2007.
2. Levine B.M., Shao M., Liu D., Wallace J.K., and Lane B. Planet detection in visible light with a single aperture telescope and nulling coronagraph. Proc. SPIE 5170 (2003) 200-208
3. Levine B.M., Shao M., Beichman C.A., Mennesson B., Morgan R., Orton G., Serabyn E., Unwin S., Velusamy T., and Woolf N. Visible light terrestrial planet finder-planet detection and spectroscopy by nulling interferometry with a single aperture telescope. Proc. SPIE 4852 (2003) 221-229
4. Stewart J.B., Bifano T.G., Bierden P., Cornelissen S., Cook T., and Levine B.M. Design and development of a 329-segment tip-tilt-piston mirror array for space-based adaptive optics. Proc. SPIE 5894 (2005)
5. Bifano T.G., Perreault J., Mali R.K., and Horenstein M.N. Microelectromechanical deformable mirrors. J. Select. Top. Quant. Electron. 5 (1999) 83-90
6. Bifano T.G., Mali R., Perreault J., Dorton K., Vandelli N., Horentein M., and Castanon D. Continuous membrane, surface micromachined silicon deformable mirror. Opt. Eng. 36 5 (1997) 1354-1360
7. Roark R.J., and Young W.C. Formulas for Stress and Strain (1982), McGraw-Hill, New York
8. Timoshenko S., and Woinowsky-Krieger S. Theory of Plates and Shells (1987), McGraw-Hill, New York
9. Popov E. Engineering Mechanics of Solids (1999), Prentice Hall, New Jersey
10. Zhang X., Zhang T., Wong M., and Zohar Y. Rapid thermal annealing of polysilicon thin films. J. Microelectromech. Syst. 7 (1998) 356-364
11. Madou M. Fundamentals of Microfabrication (2002), CRC Press, New York
12. Bifano T.G., Johnson H.T., Bierden P., and Mali R.K. Elimination of stress induced curvature in thin-film structures. J. Microelectromech. Syst. 11 (2002) 592