RIE-induced carrier lifetime degradation

Progress in Photovoltaics: Research and Applications

Volumn 18, Issue 3, 2010, Pages 214-220

  Zin, Ngwe Soe ^a   Blakers, Andrew ^a   Weber, Klaus ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Carrier lifetime; QSSPC; Radiation damage; RIE

Indexed keywords

CARRIER RECOMBINATION; CHARACTERISATION; DIELECTRIC LAYER; EFFECTIVE LIFETIME; LIFETIME DEGRADATION; MEASUREMENT TECHNIQUES; QSSPC; QUASI-STEADY-STATE PHOTOCONDUCTANCE; SILICON SAMPLES;

DEGRADATION; RADIATION DAMAGE; REACTIVE ION ETCHING; SILICON COMPOUNDS; SILICON OXIDES; SILICON WAFERS; SOLAR CELLS;

CARRIER LIFETIME;

EID: 77951651807     PISSN: 10627995     EISSN: 1099159X     Source Type: Journal    
DOI: 10.1002/pip.935     Document Type: Article

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