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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 2, 2004, Pages 707-709

Fabrication of two-dimensional InP-based photonic crystals by chlorine based chemically assisted ion beam etching

(7) Mulot, M a Anand, S a Ferrini, R b Wild, B b Houdre R b Moosburger, J c Forchel, A c

a ROYAL INSTITUTE OF TECHNOLOGY (Sweden)

b EPFL (Switzerland)

c UNIVERSITY OF WÜRZBURG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; CRYSTAL ORIENTATION; CRYSTALS; ELECTRON BEAM LITHOGRAPHY; ENERGY GAP; ETCHING; ION BEAMS; LIGHT TRANSMISSION; METALLORGANIC VAPOR PHASE EPITAXY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR QUANTUM WELLS; WAVEGUIDES;

CAVITY QUALITY FACTORS; CHEMICALLY ASSISTED ION BEAM ETCHING (CAIBE); PHOTONIC BAND GAPS; PHOTONIC CRYSTALS (PHC);

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 2342466114 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1688353 Document Type: Article

Times cited : (31)

References (10)

1
- 0031153804
- T. Baba, IEEE J. Sel. Top. Quantum Electron. 3, 808 (1997).
- (1997) IEEE J. Sel. Top. Quantum Electron. , vol.3 , pp. 808
- Baba, T.¹

2
- 0037279896
- M. Mulot, S. Anand, M. Swillo, M. Qiu, B. Jaskorzynska, and A. Talneau, J. Vac. Sci. Technol. B 21, 900 (2003).
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 900
- Mulot, M.¹ Anand, S.² Swillo, M.³ Qiu, M.⁴ Jaskorzynska, B.⁵ Talneau, A.⁶

3
- 0036648055
- R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand, and R. Houdré, IEEE J. Quantum Electron. 38, 786 (2002).
- (2002) IEEE J. Quantum Electron. , vol.38 , pp. 786
- Ferrini, R.¹ Leuenberger, D.² Mulot, M.³ Qiu, M.⁴ Moosburger, J.⁵ Kamp, M.⁶ Forchel, A.⁷ Anand, S.⁸ Houdré, R.⁹

4
- 0036441713
- M. Mulot, S. Anand, C. F. Carlström, M. Swillo, and A. Talneau, Phys. Scr., T T101, 106 (2002).
- (2002) Phys. Scr., T , vol.T101 , pp. 106
- Mulot, M.¹ Anand, S.² Carlström, C.F.³ Swillo, M.⁴ Talneau, A.⁵

5
- 0037498612
- R. Ferrini, R. Houdré, H. Benisty, M. Qiu, and J. Moosburger, J. Opt. Soc. Am. B 20, 469 (2003).
- (2003) J. Opt. Soc. Am. B , vol.20 , pp. 469
- Ferrini, R.¹ Houdré, R.² Benisty, H.³ Qiu, M.⁴ Moosburger, J.⁵

6
- 0037450262
- R. Ferrini, B. Lombardet, B. Wild, R. Houdré, and G.-H. Duan, Appl. Phys. Lett. 82, 1009 (2003).
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1009
- Ferrini, R.¹ Lombardet, B.² Wild, B.³ Houdré, R.⁴ Duan, G.-H.⁵

7
- 0037102022
- R. Ferrini et al., Electron. Lett. 38, 962 (2002).
- (2002) Electron. Lett. , vol.38 , pp. 962
- Ferrini, R.¹

8
- 0037026388
- M. Qiu, B. Jaskorzynska, M. Swillo, and H. Benisty, Microwave Opt. Technol. Lett. 34, 387 (2002).
- (2002) Microwave Opt. Technol. Lett. , vol.34 , pp. 387
- Qiu, M.¹ Jaskorzynska, B.² Swillo, M.³ Benisty, H.⁴

9
- 0003770392
- H. Benisty, D. Labilloy, C. Weisbuch, C. J. M. Smith, T. F. Krauss, D. Cassagne, A. Beraud, and C. Jouanin, Appl. Phys. Lett. 76, 532 (2000).
- (2000) Appl. Phys. Lett. , vol.76 , pp. 532
- Benisty, H.¹ Labilloy, D.² Weisbuch, C.³ Smith, C.J.M.⁴ Krauss, T.F.⁵ Cassagne, D.⁶ Beraud, A.⁷ Jouanin, C.⁸

10
- 0036903663
- I. Alvarado-Rodriguez and E. Yablonovitch, J. Appl. Phys. 92, 6399 (2002)
- (2002) J. Appl. Phys. , vol.92 , pp. 6399
- Alvarado-Rodriguez, I.¹ Yablonovitch, E.²

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