Advanced dry processes for crystalline silicon solar cells

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2005, Pages 1149-1152

  Agostinelli, G ^a   Choulat, P ^a   Dekkers, H F W ^a   De Wolf, S ^a   Beaucarne, G ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES; ELECTRIC IMPEDANCE; PASSIVATION; SOLAR CELLS; SUBSTRATES; TEXTURING;

DIELECTRIC PASSIVATION; PLASMA BASED PROCESSING TECHNOLOGY; TECHNOLOGICAL BARRIERS;

CRYSTALLINE MATERIALS;

EID: 27944484515     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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3. th EU PVSEC, 2004
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6. th EU PVSEC, 2004
7. th EU PVSEC, 2004
8. J. Rentsch, J. Jaus and R. Preu, "Economical and Ecological Aspects of plasma processing for industrial solar cell fabrication", this conference
9. S. Raoux and J.C. Lancan, "Remote NFS Chamber Clean Virtually Eliminates PFC Emissions from CVD Chambers and Improves System Productivity", Semiconductor Fabtech 9, 1999, pp. 107-113