Texturisation of multicrystalline silicon solar cells by RIE and plasma etching

Solar Energy Materials and Solar Cells

Volumn 80, Issue 2, 2003, Pages 227-237

  Nositschka, W A ^a   Voigt, O ^a,c   Manshanden, P ^b   Kurz, H ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b TNO   (Netherlands)

^c Shell Solar Deutschland GmbH   (Germany)

Author keywords

Multicrystalline; Plasma etching; RIE; Silicon; Texturisation

Indexed keywords

CRYSTALLINE MATERIALS; PLASMA ETCHING; REACTIVE ION ETCHING; SILICON WAFERS;

COLLOIDAL MASKS;

SOLAR CELLS;

EID: 0141998785     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2003.06.003     Document Type: Article

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