Interaction of vacuum ultraviolet excimer laser radiation with fused silica: II. Neutral atom and molecule emission

Journal of Applied Physics

Volumn 107, Issue 3, 2010, Pages

  George, Sharon R ^a   Langford, S C ^a   Dickinson, J T ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIBONDING; CHEMICAL STATE; DEFECT INTERACTIONS; DIRECT EMISSIONS; EMISSION INTENSITY; FLUENCES; HARTREE-FOCK CALCULATIONS; MECHANICAL TREATMENTS; NEUTRAL ATOMS; OPTICAL BREAKDOWN; STRAINED BONDS; THERMAL TREATMENT; TIME OF FLIGHT MEASUREMENTS; VACUUM ULTRAVIOLETS;

DANGLING BONDS; EXCIMER LASERS; GAS LASERS; MULTIPHOTON PROCESSES; POINT DEFECTS; SILICA; SILICON COMPOUNDS; SURFACE DEFECTS; ULTRAVIOLET LASERS;

FUSED SILICA;

EID: 77950257480     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.3290879     Document Type: Article

References (40)

1. T. H. DiStefano and D. E. Eastman, Solid State Commun. SSCOA4 9, 2259 (1971).10.1016/0038-1098(71)90643-0
2. H. Hosono, Y. Abe, H. Imagawa, H. Imai, and K. Arai, Phys. Rev. B PRBMDO 44, 12043 (1991).10.1103/PhysRevB.44.12043
3. K. Saito and A. J. Ikushima, Phys. Rev. B PRBMDO 62, 8584 (2000).10.1103/PhysRevB.62.8584
4. J. Ihlemann, S. Müller, S. Puschmann, D. Schäfer, M. Wei, J. Li, and P. R. Herman, Appl. Phys. A: Mater. Sci. Process. APAMFC 76, 751 (2003).10.1007/s00339-002-1467-8
5. D. Schäfer, J. Ihlemann, G. Marowsky, and P. R. Herman, Appl. Phys. A: Mater. Sci. Process. APAMFC 72, 377 (2001).10.1007/s003390100779
6. P. R. Herman, R. S. Marjoribanks, A. Oettl, K. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. ASUSEE 154–155, 577 (2000).10.1016/S0169-4332(99)00463-8
7. S. R. George, J. A. Leraas, S. C. Langford, and J. T. Dickinson, J. Appl. Phys. JAPIAU 107, 033107 (2010).
8. S. R. George, S. C. Langford, and J. T. Dickinson, J. Appl. Phys. JAPIAU 107, 033109 (2010).
9. D. R. Ermer, S. C. Langford, and J. T. Dickinson, J. Appl. Phys. JAPIAU 81, 1495 (1997).10.1063/1.364183
10. K. H. Nwe, S. C. Langford, and J. T. Dickinson, J. Appl. Phys. JAPIAU 98, 013506 (2005).10.1063/1.1927701
11. J. J. Shin, D. R. Ermer, S. C. Langford, and J. T. Dickinson, Appl. Phys. A: Mater. Sci. Process. APAMFC 64, 7 (1996).10.1007/s003390050438
12. T. Akiba, Y. Akimune, N. Hirosaki, and J. T. Dickinson, J. Mater. Sci. Lett. JMSLD5 14, 898 (1995).10.1007/BF00639319
13. M. L. Dawes, W. Hess, Y. Kawaguchi, S. C. Langford, and J. T. Dickinson, Appl. Phys. A: Mater. Sci. Process. APAMFC 69, S547 (1999).10.1007/s003390051468
14. R. Kelly, J. Chem. Phys. JCPSA6 92, 5047 (1990).10.1063/1.458540
15. H. S. Carslaw and J. C. Jaeger, Conduction of Heat in Solids, 2nd ed. (Oxford, London, 1959).
16. D. W. Marquardt, SIAM J. Appl. Math. SMJMAP 11, 431 (1963).10.1137/0111030
17. W. H. Press, B. P. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes in Pascal: The Art of Scientific Computing (Cambridge University, Cambridge, 1989).
18. H. Bracht, R. Staskunaite, E. E. Haller, P. Fielitz, G. Borchardt, and D. Grambole, J. Appl. Phys. JAPIAU 97, 046107 (2005).10.1063/1.1857051
19. V. O. Altemose and S. S. C. Tong, J. Non-Cryst. Solids JNCSBJ 38–39, 587 (1980).10.1016/0022-3093(80)90500-1
20. L. Huang and J. Kieffer, Appl. Phys. Lett. APPLAB 89, 141915 (2006).10.1063/1.2357016
21. Y. S. Touloukian, R. W. Powell, C. Y. Ho, and M. C. Nicolaou, Thermal Diffusivity (Plenum, New York, 1973), Vol. 10.
22. J. Zhang, P. R. Herman, C. Lauer, K. P. Chen, and M. Wei, in Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, edited by M. C. Gower, H. Helvajian, K. Sugioka, and J. J. Dubowski (SPIE, Belleview, 2001), Vol. 4274, pp. 125–132.
23. E. Eva and K. Mann, Appl. Surf. Sci. ASUSEE 109–110, 52 (1997).10.1016/S0169-4332(96)00618-6
24. K. Kurosawa, P. R. Herman, and W. Sasaki, J. Photopolym. Sci. Technol. JSTEEW 11, 367 (1998).10.2494/photopolymer.11.367
25. H. Hosono, Y. Ikuta, T. Kinoshita, K. Kajihara, and M. Hirano, Phys. Rev. Lett. PRLTAO 87, 175501 (2001).10.1103/PhysRevLett.87.175501
26. K. Kajihara, Y. Ikuta, M. Hirano, and H. Hosono, Appl. Phys. Lett. APPLAB 81, 3164 (2002).10.1063/1.1514395
27. K. Kajihara, L. Skuja, M. Hirano, and H. Hosono, Appl. Phys. Lett. APPLAB 79, 1757 (2001).10.1063/1.1404407
28. V. Sulimov, P. V. Shushko, A. H. Edwards, A. L. Shluger, and A. M. Stoneham, Phys. Rev. B PRBMDO 66, 024108 (2002).10.1103/PhysRevB.66.024108
29. K. Kajihara, L. Skuja, M. Hirano, and H. Hosono, Phys. Rev. Lett. PRLTAO 92, 015504 (2004).10.1103/PhysRevLett.92.015504
30. S. O. Kucheyev and S. G. Demos, Appl. Phys. Lett. APPLAB 82, 3230 (2003).10.1063/1.1573364
31. R. Tohmon, H. Mizuno, Y. Ohki, K. Sasagane, K. Nagasawa, and Y. Hama, Phys. Rev. B PRBMDO 39, 1337 (1989).10.1103/PhysRevB.39.1337
32. W. J. Hehre, J. Uy, P. E. Klunzinger, and L. Lou, A Brief Guide to Molecular Mechanics and Quantum Mechanical Calculations (Wavefunction, Irvine, 1998).
33. L. Skuja, J. Non-Cryst. Solids JNCSBJ 239, 16 (1998).10.1016/S0022-3093(98)00720-0
34. M. Mizuguchi, L. Skuja, H. Hosono, and T. Ogawa, J. Vac. Sci. Technol. B JVTBD9 17, 3280 (1999).10.1116/1.590995
35. J. H. Stathis and M. A. Kastner, Phys. Rev. B PRBMDO 29, 7079 (1984).10.1103/PhysRevB.29.7079
36. K. M. Davis and M. Tomozawa, J. Non-Cryst. Solids JNCSBJ 185, 203 (1995).10.1016/0022-3093(95)00015-1
37. L. Zheng, J. C. Lambropoulos, and A. Schmid, J. Non-Cryst. Solids JNCSBJ 351, 3271 (2005).10.1016/j.jnoncrysol.2005.07.026
38. C. M. Smith and N. F. Borrelli, J. Opt. Soc. Am. B JOBPDE 23, 1815 (2006).10.1364/JOSAB.23.001815
39. L. Skuja, K. Kajihara, Y. Ikuta, M. Hirano, and H. Hosono, J. Non-Cryst. Solids JNCSBJ 345–346, 328 (2004).10.1016/j.jnoncrysol.2004.08.038
40. S. C. Cheng, S. L. Schiefelbein, L. A. Moore, M. Pierson-Stull, C. M. Smith, and S. Sen, J. Non-Cryst. Solids JNCSBJ 352, 3140 (2006).10.1016/j.jnoncrysol.2006.04.015