Urbach absorption edge of silica: Reduction of glassy disorder by fluorine doping

Journal of Non-Crystalline Solids

Volumn 345-346, Issue , 2004, Pages 328-331

  Skuja, L ^a,b   Kajihara, K ^a   Ikuta, Y ^a   Hirano, M ^a   Hosono, H ^a,c  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b UNIVERSITY OF LATVIA   (Latvia)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; DOPING (ADDITIVES); FLUORINE; LIGHT ABSORPTION; LITHOGRAPHY; QUENCHING; ULTRAVIOLET RADIATION;

ABSORPTION EDGE; DOPANTS; PHOTON ENERGY; WAVELENGTHS;

SILICA;

EID: 9544238133     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.08.038     Document Type: Conference Paper

References (16)

1. M. Kyoto, Y. Ohoga, S. Ishikawa, Y. Ishiguro, J. Mater. Sci. 28 (1993) 2738.
2. M. Mizuguchi, L. Skuja, H. Hosono, T. Ogawa, J. Vac. Sci. Technol. B 17 (1999) 3280.
3. V. Liberman, T.M. Bloomstein, M. Rothschild, J.H.C. Sedlacek, R.S. Uttaro, A.K. Bates, C. Van Peski, K. Orvek, J. Vac. Sci. Technol. B 17 (1999) 3273.
4. G. D. Cody, T. Tiedje, B. Abeles, B. Brooks, Y. Goldstein, Phys. Rev. Lett. 47 (1981) 1480.
5. H. Hosono, Y. Ikuta, Nucl. Instrum. Methods Phys. Res. B166-B167 (2000) 691.
6. K. Saito, A.J. Ikushima, J. Appl. Phys. 91 (2002) 4886.
7. K. Ishii, A. Takami, Y. Ohki, J. Appl. Phys. 81 (1997) 1470.
8. P.L. Lamy, Appl. Optics 16 (1977) 2212.
9. A.G. Heraeus Tenevo, datasheet 'Fluosil Preforms' (2002).
10. I.T. Godmanis, A.N. Trukhin, K. Hübner, Phys. Status Solidi B 116 (1983) 279.
11. K. Saito, A.J. Ikushima, Phys. Rev. B 62 (2000) 8584.
12. H. Imai, K. Arai, H. Imagawa, H. Hosono, Y. Abe, Phys. Rev. B 38 (1988) 12772.
13. G. Pacchioni, G. Ierano, Phys. Rev. B 57 (1998) 818.
14. Y. Morimoto, S. Nozawa, H. Hosono, Phys. Rev. B 59 (1999) 4066.
15. C.A.M. Mulder, J. Non-Cryst. Solids 95&96 (1987) 303.
16. L. Skuja, H. Hosono, M. Hirano, K. Kajihara, Proc. SPIE 5122 (2003) 2.