Fluidic assembly of hybrid MEMS: A GaAs-based microcantilever spin injector

Journal of Micromechanics and Microengineering

Volumn 20, Issue 2, 2010, Pages

  Arscott, Steve ^a   Peytavit, Emilien ^a   Vu, Duong ^b   Rowe, Alistair C H ^b   Paget, Daniel ^b  

^a UNIV LILLE   (France)

^b LABORATOIRE DE PHYSIQUE DE LA MATIÈRE CONDENSÉE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FORCE; DEPOSITED LAYER; FABRICATED PARTS; FLUIDIC ASSEMBLY; GAAS; HYBRID MEMS; MAGNETIC SURFACES; MICRO-CANTILEVERS; OHMIC BEHAVIOUR; P-TYPE; PROOF OF CONCEPT; SILICA SUPPORTS; SPECIFIC CONTACT RESISTIVITY;

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; GALLIUM ALLOYS; GALLIUM ARSENIDE; JET PUMPS; MEMS; METALLIZING; MICROELECTROMECHANICAL DEVICES; OHMIC CONTACTS; OXIDES; SEMICONDUCTING GALLIUM; SILICA; SPIN DYNAMICS;

FUSED SILICA;

EID: 77950192102     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/2/025023     Document Type: Article

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