Sensor-Based Microassembly of Hybrid MEMS Devices

IEEE Control Systems

Volumn 18, Issue 6, 1998, Pages 35-45

  Nelson, Bradley J ^a   Zhou, Yu ^a   Vikramaditya, Barmeshwar ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; HYBRID SENSORS; POSITION CONTROL; SCANNING ELECTRON MICROSCOPY;

MICROMANIPULATION; PARALLEL MICROASSEMBLY; SENSOR-BASED MICROASSEMBLY; SERIAL MICROASSEMBLY;

MICROELECTROMECHANICAL DEVICES;

EID: 0032294391     PISSN: 1066033X     EISSN: None     Source Type: Journal    
DOI: 10.1109/37.736010     Document Type: Article

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