III-V micromachined devices for microsystems

Microelectronics Journal

Volumn 29, Issue 9, 1998, Pages 613-619

  Leclercq, J L ^a   Ribas, R P ^b   Karam, J M ^b   Viktorovitch, P ^a  

^a ECOLE CENTRALE DE LYON   (France)

^b TIMA LABORATORY   (France)

Author keywords

III V; MEMS; Micromachined devices; Microsystems; Microtechnology

Indexed keywords

MICROELECTRONIC PROCESSING; MICROELECTRONICS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; TECHNOLOGY; TRANSDUCERS;

MICROELECTROMECHANICAL TRANSDUCER; MICROMACHINED DEVICES; MICROSYSTEM; MICROTECHNOLOGY; MONOLITHIC INTEGRATION; OPTOELECTRONIC FUNCTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032162686     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(98)00024-x     Document Type: Article

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