Making high-fidelity imprint template by resist patterns over a flexible conductive polymer substrate

Journal of Vacuum Science and Technology B

Volumn 28, Issue 1, 2010, Pages 86-89

  Ye, Xiangdong ^a   Ding, Yucheng ^a   Duan, Yugang ^a   Liu, Hongzhong ^a   Shao, Jinyou ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTORESISTS; POLYMER FILMS; SEMICONDUCTING FILMS;

ANISOTROPIC DRY ETCHING; CONDUCTIVE POLYMER; CURVED SURFACES; ELECTRONIC BEAM LITHOGRAPHY; FLEXIBLE POLYMER FILM; HIGH-FIDELITY; MAKING PROCESS; POLYMER SUBSTRATE; RESIST PATTERN; TEMPLATE MATERIAL;

SUBSTRATES;

EID: 77949389184     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3273601     Document Type: Conference Paper

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