A self-bended piezoresistive microcantilever flow sensor for low flow rate measurement

Sensors and Actuators, A: Physical

Volumn 158, Issue 2, 2010, Pages 273-279

  Zhang, Qi ^a   Ruan, Wenzhou ^a   Wang, Han ^a   Zhou, Youzheng ^a   Wang, Zheyao ^a   Liu, Litan ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Curved up; Flow sensor; Microcantilever; Residue stress

Indexed keywords

DRAG FORCES; FLOW SENSOR; FLOW-SENSORS; HIGH SENSITIVITY; IN-BETWEEN; LOW FLOW; LOW FLOW RATE MEASUREMENT; MICRO CANTILEVER SENSORS; MICRO-CANTILEVERS; OUT-OF PLANE; PIEZO-RESISTIVE; PIEZORESISTOR; SILICON DIOXIDE; SILICON DIOXIDE LAYERS; SILICON ON INSULATOR WAFERS; TWO LAYERS; ZERO DRIFT;

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; DRAG; FLOWMETERS; MICROSENSORS; SEMICONDUCTING SILICON COMPOUNDS; SILICA;

SILICON WAFERS;

EID: 77949289624     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.02.002     Document Type: Article

References (32)

1. Fu A.Y., Spence C., Scherer A., Arnold F.H., and Quake S.R. A microfabricated fluorescence-activated cell sorter. Nat. Biotechnol. 17 (1999) 1109-1111
2. Tung Y.-C., Zhang M., Lin C.-T., Kurabayashi K., and Skerlos S.J. PDMS-based opto-fluidic micro flow cytometer with two-color, multi-angle fluorescence detection capability using PIN photodiodes. Sens. Actuators B 98 (2004) 356-367
3. Wang Y.H., Chen C.P., Chang C.M., Lin C.P., Lin C.H., Fu L.M., and Lee C.Y. MEMS-based gas flow sensors. Microfluidics Nanofluidics 6 (2009) 333-346
4. van Baar J.J., Wiegerink R.J., Lammerink T.S.J., Krijnen G.J.M., and Elwenspoek M. Micromachined structures for thermal measurements of fluid and flow parameters. J. Micromech. Microeng. 11 (2001) 311-318
5. Damean N., Regtien P.P.L., and Elwenspoek M. Heat transfer in a MEMS for microfluidics. Sens. Actuators A 105 (2003) 137-149
6. Kim S., Nam T., and Park S. Measurement of flow direction and velocity using a micromachined flow sensor. Sens. Actuators A 114 (2004) 312-318
7. Bruschi P., Diligenti A., Navarrini D., and Piotto M. A double heater integrated gas flow sensor with thermal feedback. Sens. Actuators A 123-124 (2005) 210-215
8. Buchner R., Sosna C., Maiwald M., Benecke W., and Lang W. A high-temperature thermopile fabrication process for thermal flow sensors. Sens. Actuators A 130 (2006) 262-266
9. Dijkstra M., de Boer M.J., Berenschot J.W., Lammerink T.S.J., Wiegerink R.J., and Elwenspoek M. Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sens. Actuators A 143 (2008) 1-6
10. Randjelovic D., Petropoulos A., Kaltsas G., Stojanovic M., Lazic Z., Djuric Z., and Matic M. Multipurpose MEMS thermal sensor based on thermopiles. Sens. Actuators A 141 (2008) 404-413
11. Oosterbroek R.E., Lammerink T.S.J., Berenschot J.W., Krijnen G.J.M., Elwenspoek M.C., and van den Berg A. A micromachined pressure/flow-sensor. Sens. Actuators A 77 (1999) 167-177
12. Dijkstra M., van Baar J.J., Wiegering R.J., Lammerink T.S.J., de Boer J.H., and Krijnen G.J.M. Artificial sensory hairs based on the flow sensitive receptor hairs of crickets. J. Micromech. Microeng. 15 (2005) S132-138
13. Radhakrishnan S., and Lal A. Scalable microbeam flowsensors with electronic readout. J. Microelectromech. Syst. 14 (2005) 1013-1022
14. Svedin N., Kälvesten E., and Stemme G. A lift force sensor with integrated hot-chips for wide range flow measurements. Sens. Actuators A 109 (2003) 120-130
15. Lee J., Naeli K., Hunter H., Berg J., Wright T., Courcimault C., Naik N., Allen M., Brand O., Glezer A., and King W.P. Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors. Sens. Actuators A 134 (2007) 128-139
16. Porter T.L., Eastman M.P., Pace D.L., and Bradley M. Sensor based on piezoresistive microcantilever technology. Sens. Actuators A 88 (2001) 47-51
17. Waggoner P.S., and Craighead H.G. Micro- and nanomechanical sensors for environmental, chemical, and biological detection. Lab Chip 7 (2007) 1238-1255
18. Gass V., van der Schoot B.H., and de Rooij N.F. Nanofluid handling by micro-flow-sensor based on drag force measurements. IEEE MEMS Conference (1993) 167-172
19. Su Y., Evans A.G.R., and Brunnschweiler A. Micromachined silicon cantilever paddles with piezoresistive readout for flow sensing. J. Micromech. Microeng. 6 (1996) 69-72
20. Zhang L., Ye X.Y., Zhou Z.Y., and Yao J. A micromachined single-crystal silicon flow sensor with a cantilever paddle. International Symposium of Micromechatronics Human Science (1997) 225-229
21. Kim D.K., Kang S.G., Sim J.H., Shin J.K., Choi P., and Lee J.H. Characteristics of piezoresistive mass flow sensors fabricated by porous silicon micromachining. Jpn. J. Appl. Phys. 39 (2000) 7134-7137
22. Chen N., Tucker C., Engel J.M., Yang Y., Pandya S., and Liu C. Design and characterization of artificial haircell sensor for flow sensing with ultrahigh velocity and angular sensitivity. J. Microelectromech. Syst. 16 (2007) 999-1014
23. Wang Y.H., Lee C.Y., and Chiang C.M. A MEMS-based air flow sensor with a free-standing microcantilever structure. Sensors 7 (2007) 2389-2401
24. Kao I., Kumar A., and Binder J. Smart MEMS flow sensor: theoretical analysis and experimental characterization. IEEE Sens. J. 7 (2007) 713-722
25. Quist A., Chand A., Ramachandran S., Cohen D., and Lal R. Piezoresistive cantilever based nanoflow and viscosity sensor for microchannels. Lab Chip 6 (2006) 1450-1454
26. 2 cantilever sensor for ultra-sensitive detection of gaseous chemicals. J. Micromech. Microeng. 16 (2006) 2539-2546
27. Zhou Y., Wang Z., Wang C., Ruan W., and Liu L. Design, fabrication, and characterization of a two-step released silicon dioxide piezoresistive microcantilever immunosensor. J. Micromech. Microeng. 19 (2009) 065026
28. 2 microcantilever using isotropic etching with ICP. IEEE. Sens. J. 7 (2007) 1632-1638
29. Harley J.A., and Kenny T.W. 1/f noise considerations for the design and process optimization of piezoresistive cantilevers. J. Microelectromech. Syst. 9 (2000) 226-235
30. Zhang X., Chen K.-S., Ghodssi R., Ayon A.A., and Spearing S.M. Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films. Sens. Actuators A 91 (2001) 373-380
31. Jana A., Raman A., Dhayal B., Tripp S.L., and Reifenberger R.G. Microcantilever mechanics in flowing viscous fluids. Appl. Phys. Lett. 90 (2007) 114110
32. Stegmeir M., Longmire E., and Mantell S. Parametric effects of bubble-microcantilever impacts in a confined channel. Phys. Fluids 20 (2008) 062103