Sensor based on piezoresistive microcantilever technology

Sensors and Actuators, A: Physical

Volumn 88, Issue 1, 2001, Pages 47-51

  Porter, T L ^a   Eastman, M P ^a   Pace, D L ^a   Bradley, M ^a  

^a NORTHERN ARIZONA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; COMPOSITE MICROMECHANICS; MICROSCOPIC EXAMINATION; ORGANIC POLYMERS; PATTERN RECOGNITION; PIEZOELECTRIC DEVICES;

CHEMIRESISTOR; MICROCANTILEVER; PIEZORESISTIVE MICROCANTILEVER;

MICROSENSORS;

EID: 0035128045     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00498-2     Document Type: Article

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