A micromachined single-crystal silicon flow sensor with a cantilever paddle

MHS 1997 - Proceedings of 1997 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1997, Pages 225-229

  Zhang, Lian ^a   Ye, Xiongying ^a   Zhou, Zhaoying ^a   Yao, Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; NANOCANTILEVERS; SILICON WAFERS; SINGLE CRYSTALS; STRAIN RATE;

MASS FLOW; MICRO FLOW SENSORS; MICRO-MACHINED; PIEZORESISTANCE; SILICON CANTILEVER BEAM; SILICON FLOW SENSORS; SINGLE CRYSTAL SILICON; SINGLE-CRYSTAL SILICON CANTILEVERS; SURFACE STRAINS; VOLUME FLOW RATE;

FLOW RATE;

EID: 85061011037     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.1997.768884     Document Type: Conference Paper

References (6)

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