Micromachined pressure/flow-sensor

Sensors and Actuators, A: Physical

Volumn 77, Issue 3, 1999, Pages 167-177

  Oosterbroek, R E ^a   Lammerink, T S J ^a   Berenschot, J W ^a   Krijnen, G J M ^a   Elwenspoek, M C ^a   Van Den Berg, A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; FLOW MEASUREMENT; HYDRAULICS; MATHEMATICAL MODELS; PIEZOELECTRIC TRANSDUCERS; PRESSURE DROP; PRESSURE MEASUREMENT; THERMODYNAMIC STABILITY; VISCOSITY;

CAPACITIVE READ OUT; FLOW SENSOR; HYDRAULIC RESISTANCE; PRESSURE SENSOR; VISCOSITY CHANGES;

SENSORS;

EID: 0033312151     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00188-0     Document Type: Article

References (13)

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