|
Volumn 109, Issue 1-2, 2003, Pages 120-130
|
A lift force sensor with integrated hot-chips for wide range flow measurements
|
Author keywords
Anemometer; Gas flow sensor; Lift force; Piezoresistive
|
Indexed keywords
AIRFOILS;
ALGORITHMS;
ANEMOMETERS;
COMPUTER SIMULATION;
DRAG;
FLOW OF FLUIDS;
FLUID MECHANICS;
MECHANICAL PROPERTIES;
POLYSILICON;
SIGNAL PROCESSING;
GAS FLOW SENSORS;
LIFT FORCE;
PIEZORESISTORS;
CHEMICAL SENSORS;
|
EID: 0942268197
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/j.sna.2003.05.003 Document Type: Article |
Times cited : (33)
|
References (8)
|