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Volumn 109, Issue 1-2, 2003, Pages 120-130

A lift force sensor with integrated hot-chips for wide range flow measurements

Author keywords

Anemometer; Gas flow sensor; Lift force; Piezoresistive

Indexed keywords

AIRFOILS; ALGORITHMS; ANEMOMETERS; COMPUTER SIMULATION; DRAG; FLOW OF FLUIDS; FLUID MECHANICS; MECHANICAL PROPERTIES; POLYSILICON; SIGNAL PROCESSING;

EID: 0942268197     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.05.003     Document Type: Article
Times cited : (33)

References (8)
  • 1
    • 0031089321 scopus 로고    scopus 로고
    • Micromachined flow sensors - A review
    • Nguyen N.T. Micromachined flow sensors - a review. Flow Measure. Instrum. 8:1997;7-16.
    • (1997) Flow Measure. Instrum. , vol.8 , pp. 7-16
    • Nguyen, N.T.1
  • 3
    • 0040674567 scopus 로고
    • Sensors for measureing flow
    • J.H.W. Göpel, J.N. Zemel (Eds.)
    • P. Vigo, F. Cascetta, Sensors for measureing flow, in: J.H.W. Göpel, J.N. Zemel (Eds.), Sensors - A Comprehensive Survey, vol. 7, 1994, pp. 375-436.
    • (1994) Sensors - A Comprehensive Survey , vol.7 , pp. 375-436
    • Vigo, P.1    Cascetta, F.2
  • 5
    • 0042638153 scopus 로고    scopus 로고
    • A lift force flow sensor designed for acceleration insensitivity
    • N. Svedin, E. Kälvesten, E. Stemme, G. Stemme, A lift force flow sensor designed for acceleration insensitivity, Sens. Actuators A 68(1-3) (1998) 263-268.
    • (1998) Sens. Actuators A , vol.68 , Issue.1-3 , pp. 263-268
    • Svedin, N.1    Kälvesten, E.2    Stemme, E.3    Stemme, G.4
  • 7
    • 0003863147 scopus 로고
    • Oxford Science Publications, Oxford
    • H.H. Bruun, Hot-Wire Anemometry, Oxford Science Publications, Oxford, 1995.
    • (1995) Hot-wire Anemometry
    • Bruun, H.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.