Nano- and microlens arrays grown using atomic-layer deposition

IEEE Photonics Technology Letters

Volumn 18, Issue 24, 2006, Pages 2650-2652

  Wang, Jian Jim ^a   Nikolov, Anguel ^a   Wu, Qihong ^a  

^a NanoOpto Corporation   (United States)

Author keywords

Atomic layer deposition; Microlens array

Indexed keywords

OPTICAL MATERIALS; PARTICLE OPTICS; REFRACTIVE INDEX;

ATOMIC LAYER DEPOSITION; FILL FACTOR; MICROLENS ARRAY;

MICROLENSES;

EID: 33845805278     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2006.887775     Document Type: Article

References (22)

1. D. Daly, "Applications and Fabrication Technologies," in Microlens Array. London, U.K.: Talyer & Francis, 2001.
2. N. E. Borrelli, Microoptics Technology - Fabrication and Application of Lens Arrays and Devices. New York: Marcel Dekker, 1999.
3. N. F. Borrelli, in LCD 44th Electronics Components and Technology Conf., 1994, pp. 338-345.
4. Y. T. Fan, C. S. Peng, and C. Y. Chu, Proc. SPIE, vol. 4115, p. 263, 2000.
5. P. Nussbaum, R. Völkel, H. P. Herszig, M. Eisner, and S. Haselbeck, "Design, fabrication and testing of microlens arrays for sensors and microsystems," Pure Appl. Opt., vol. 6, pp. 617-636, 1997.
6. S. Möller and S. R. Forrest, "Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays," J. Appl. Phys., vol. 91, pp. 3324-3327, 2002.
7. M. V. Kunnavakkam, F. M. Houlihan, M. Schlax, J. A. Liddle, P. Kolodner, O. Nalamasu, and J. A. Rodgers, "Low-cost, low-loss microlens arrays fabricated by soft-lithography replication process," Appl. Phys. Lett., vol. 82, pp. 1152-1154, 2003.
8. M.-H. Wu and G. M. Whitesides, "Fabrication of two-dimensional arrays of microlenses and their applications in photolithography," J. Micromech. Microeng., vol. 12, pp. 747-758, 2002.
9. Z. D. Popovic, R. A. Sprague, and G. A. N. Connell, "Technique for monolithic fabrication of microlens arrays," Appl. Opt., vol. 27, no. 7, pp. 1281-1284, 1988.
10. Z. L. Liau, V. Diaduik, J. N. Walpole, and D. E. Mull, "Gallium phosphide microlenses by mass transport," Appl. Phys. Lett., vol. 55, pp. 97-99, 1989.
11. T. J. Suleski and D. C. O'Shea, "Gray-scale masks for diffractive-optics fabrication: I. Commercial slide imagers," Appl. Opt., vol. 34, pp. 7507-7517, 1995.
12. 2 hybrid sol-gel material for fabrication of microlens array," IEEE Photon. Technol. Lett., vol. 17, no. 6, pp. 1223-1225, Jun. 2005.
13. M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, "Fabrication of continuous- relief micro-optical elements by direct laser writing in photoresist," Opt. Eng., vol. 33, pp. 3556-3566, 1994.
14. M. He, X. Yuan, N. Ngo, J. Bu, and S. H. Tao, "Single-step fabrication of a microlens array in sol-gel material by direct laser writing and its application in optical coupling," J. Opt. A, Pure and Appl. Opt., vol. 6, pp. 94-97, 2004.
15. Y. Fu and N. K. A. Bryan, "Investigation of diffractive-refractive microlens array fabricated by focused ion beam technology," Opt. Eng., vol. 40, no. 4, pp. 511-516, 2001.
16. A. Schilling, R. Merz, C. Ossmann, and H. P. Herzig, "Surface profiles of reflow microlenses under the influence of surface tension and gravity," Opt. Eng., vol. 39, pp. 2171-2176, 2000.
17. I. Mitchell, UBC Department of Computer Science Technical Report TR-2004-09, Jul. 2004.
18. T. Suntola and M. Simpson, Atomic Layer Epitaxy. Glasgow: Blackie, 1990.
19. R. G. Gordon, D. Hausmann, E. Kim, and J. Shepard, "Kinetic model for step coverage by alternating layer deposition (ALD) in narrow holes or trenches," Chem. Vapor Depos., vol. 9, pp. 73-78, 2003.
20. B. S. Lim, R. Antti, and G. Gordon, "Atomic layer deposition of transition metals," Nature Mater., vol. 2, pp. 749-754, 2003.
21. J. Wang, X. Deng, R. Varghese, A. Nikolov, P. Sciortino, F. Liu, and L. Chen, "High-performance optical retarders based on all-dielectric immersion nanogratings," Opt. Lett., vol. 30, pp. 1864-1866, 2005.
22. J. Wang, X. Deng, R. Varghese, A. Nikolov, P. Sciortino, F. Liu, L. Chen, and X. Liu, "Filling high aspect-ratio nano-structures by atomic layer deposition and its applications in nano-optic devices and integrations," J. Vac. Sci. Technol. B, vol. 23, no. 6, pp. 3209-3213, Nov./Dec. 2005.