Phase evolution of sol-gel prepared Pb(Zr0.3Ti 0.7)O3 thin films deposited on IrO2/TiO 2/SiO2/Si electrodes

Thin Solid Films

Volumn 467, Issue 1-2, 2004, Pages 104-111

  Van Genechten, D ^a   Vanhoyland, G ^a   D'Haen, J ^b   Johnson, J ^c   Wouters, D J ^c   Van Bael, M K ^a   Van Den Rul, H ^a   Mullens, J ^a   Van Poucke, L C ^a  

^a HASSELT UNIVERSITY   (Belgium)

^b HASSELT UNIVERSITY   (Belgium)

^c IMEC   (Belgium)

Author keywords

IrO2 electrode; Phase evolution; PZT films; TEM

Indexed keywords

ANNEALING TIME; IRO2; PHASE EVOLUTION; PZT FILMS;

DEPOSITION; ELECTRODES; SCANNING ELECTRON MICROSCOPY; SOL-GELS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

LEAD COMPOUNDS;

EID: 4444320093     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.03.021     Document Type: Article

References (22)

1. Moulson A.J., Herbert J.M. Electroceramics: Materials, Properties and Applications. 1990;Chapman & Hall, London.
2. Voigt J.A., Tuttle B.A., Headly T.J., Lamppa D.L. Mater. Res. Soc. Symp. Proc. 361:1995;395.
3. Tiwari V.S., Kumar A., Wadhawan V.K. J. Mater. Res. 13:1998;2170.
4. Brooks K.G., Reany I.M., Klissurska R., Huang Y., Bursill L., Setter N. J. Mater. Res. 9:1994;2540.
5. Lefevre M.J., Speck J.S., Schwartz R.W., Dimos D., Lockwood S.J. J. Mater. Res. 11:1996;2076.
6. Norga G.J., Wouters D.J. Integr. Ferroelectr. 31:2000;205.
7. Warren W.L., Dimos D., Waser R.M. Mater. Res. Soc. Bull. 21:1996;40.
8. Lee J.J., Thio C.L., Desu S.B. Phys. Statatus. Solidi, A. 151:1995;171.
9. Dawber M., Scott J.F. Appl. Phys. Lett. 76:2000;1060.
10. Nouwen R., Mullens J., Franco D., Yperman J., Van Poucke L.C. Vibr. Spectrosc. 10:1996;291.
11. D.J. Wouters, G. Norga, H. Maes, R. Nouwen, J. Mullens, D. Franco, J. Yperman, L.C. Van Poucke, U.S. Patent No. US 6,300,144 B1, 9 Oct. 2001.
12. Muralt P., Maeder T., Sagalowicz L., Hiboux S., Scalese S., Naumovic D., Agostino R.G., Xanthopoulos N., Mathieu H.J., Patthey L., Bullock E.L. J. Appl. Phys. 83:1998;3835.
13. Sato E., Huang Y., Kosec M., Bell A., Setter N. Appl. Phys. Lett. 65:1994;2678.
14. Klee M., De Veirman A., Taylor D.J., Larsen P.K. Integr. Ferroelectr. 4:1994;197.
15. Hardtl K.H., Rau H. Solid State Comm. 7:1969;41.
16. Chen K.C., Mackenzie J.D. Mater. Res. Soc. Symp. Proc. 180:1990;663.
17. Meyers S.A., Chapin L.N. Mater. Res. Symp. Proc. 200:1990;231.
18. Chen S.-Y., Chen I.-W. J. Am. Ceram. Soc. 77:1994;2337.
19. Chen S.-Y., Chen I.-W. J. Am. Ceram. Soc. 81:1998;97.
20. Beanland R., Patel A., Hart D. Integr. Ferroelectr. 13:1996;179.
21. Wouters D.J., Maes H.E. Microelectron. Reliab. 36:1996;1763.
22. Fè L., Norga G.J., Wouters D.J., Maes H.E. J. Mater. Res. 16:2001;2499.