Preparation of Conductive LaNiO3 Thin Films by Using Reactive RF Magnetron Sputtering with La and Ni Metals

Journal of the Korean Physical Society

Volumn 43, Issue 5 II, 2003, Pages 847-849

  Kim, Heesan ^a   Kim, Jai Hyun ^a   Choo, Woong Kil ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Bottom electrode; Resistivity; RF sputtering

Indexed keywords

EID: 0344982796     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.43.847     Document Type: Article

References (10)

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