On the influence of the top and bottom electrodes-A comparative study between Pt and LNO electrodes for PZT thin films

Journal of Crystal Growth

Volumn 310, Issue 14, 2008, Pages 3299-3302

  Sama, Nossikpendou ^a   Herdier, Romain ^a,b   Jenkins, David ^c   Soyer, Caroline ^a   Remiens, Denis ^a   Detalle, Mickaël ^a   Bouregba, Rachid ^d  

^a INSTITUT D ELECTRONIQUE   (France)

^b ONERA   (France)

^c UNIVERSITY OF PLYMOUTH   (United Kingdom)

^d UNIVERSITÉ DE CAEN   (France)

Author keywords

A1. Interfaces; B1. Metals; B1. Oxides; B1. Perovskites; B2. Dielectric materials; B2. Ferroelectric materials; B2. Piezoelectric materials

Indexed keywords

ELECTRODES; LANTHANUM COMPOUNDS; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; PLATINUM COMPOUNDS;

LNO ELECTRODES; PZT THIN FILMS;

THIN FILMS;

EID: 46549086535     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2008.04.025     Document Type: Article

References (17)

1. Velu G., Remiens D., and Thierry B. J. Eur. Ceram. Soc. 17 14 (1997) 1749
2. Wang Y.K., Tseng T.Y., and Lin P. Appl. Phys. Lett. 80 (2002) 3790
3. Ramesh R., Gilchrist H., Sands T., Keramidas V.G., Haakenaasen R., and Fork D.K. Appl. Phys. Lett. 63 (1993) 3592
4. Ramesh R., Chan W.K., Wilkens B., Gilchrist H., Sands T., and Tarascon J.M. Appl. Phys. Lett. 61 (1992) 1537
5. Wu T.-B., Liu C.-Lin., and Liu Y.-Wen. J. Mater. Res. 17 (2002) 1350
6. Wu Wenbin., Wong K.H., Choy C.L., and Zhang Y.H. Appl. Phys. Lett. 77 (2000) 3441
7. Hase T., and Shiosaki T. Jpn. J. Appl. Phys. 30 (1991) 2159
8. Abe K., Tomita H., Toyoda H., Imai M., and Yokote Y. Jpn. J. Appl. Phys. 30 (1991) 2152
9. Han H., et al. Appl. Phys. Lett. 88 (2006) 092902
10. Wang, et al. J. Appl. Phys. 101 (2007) 016101
11. Bao D., Ruan K., and Liang T. J. Sol-Gel Sci. Technol. 42 (2007) 353
12. Remiens D., Cattan E., Soyer C., and Haccart T. Mater. Sci. Semicond. Process. 92 6 (2002) 348
13. M. Pokorny, M. Sulc, R. Herdier, D. Remiens, E. Dogheche, D. Jenkins, Presented at ECAP08, September Metz, France, 2006 (in print).
14. Khalkis A., Wutchrich Ch., Taylor D.V., and Setter N. Rev. Sci. Instrum. 67 (1996) 1935
15. T. Iijima, H. Okino, T. Yamamoto, Presented at ISAF 2007, Nara, Japan, 2007.
16. Bouregba R., Le Rhun G., Poullain G., and Leclerc G. J. Appl. Phys. 99 (2006) 034102
17. Kim H., Kim J.H., and Choo W.K. J. Korean Phys. Soc. 43 (2003) 847