High resolution microresonator-based digital temperature sensor

Applied Physics Letters

Volumn 91, Issue 7, 2007, Pages

  Jha, C M ^a   Bahl, G ^a   Melamud, R ^a   Chandorkar, S A ^a   Hopcroft, M A ^a   Kim, B ^a   Agarwal, M ^a   Salvia, J ^a   Mehta, H ^a   Kenny, T W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; OPTICAL RESOLVING POWER; RESONATORS; SILICON COMPOUNDS;

DIGITAL TEMPERATURE SENSING; DUAL-RESONATOR DESIGN; HIGH RESOLUTION MICRORESONATORS; MICROMECHANICAL SILICON RESONATORS;

TEMPERATURE SENSORS;

EID: 34548045073     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2768629     Document Type: Article

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