On electrostatic actuation beyond snapping condition

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 600-603

  Fargas Marques, A ^a   Shkel, A M ^b  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^b University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; STABILITY; STATISTICAL METHODS;

ACTUATION RANGE; ELECTROSTATIC ACTUATION; SNAPPING CONDITION;

ELECTROSTATIC ACTUATORS;

EID: 33847307523     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597770     Document Type: Conference Paper

References (5)

1. R. K. Gupta and S. Senturia, "Pull-in time dynamics as a measure of absolute pressure," in Xth Annual International Workshop on Micro Electro Mechanical Systems, 1997, pp. 290-294.
2. C. C. Painter and A. M. Shkel, "Active structural error suppression in mems vibratory rate integrating gyroscopes," IEEE Sensors Journal, 2003.
3. R. K. Gupta, E. Hung, Y. Yang, G. Ananthasuresh, and S. Senturia, "Pull-in dynamics of electrostatically-actuated beams," in Solid-State Sensors and Actuators Workshop, Late News Session, 1996.
4. A. Fargas-Marques and A. M. Shkel, "On electrostatic actuation beyond snapping condition," in Eurosensors XIX, 2005.
5. J. I. Seeger and B. E. Boser, "Parallel-plate driven oscillations and resonant pull-in," in Solid-State Sensor, Actuator and Microsystems Workshop Hilton Head Island, 2002.