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Volumn 90, Issue 12, 2003, Pages
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Thermal transpiration at the microscale: A crookes cantilever
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
FLUID DYNAMICS;
MICROELECTROMECHANICAL DEVICES;
PRESSURE EFFECTS;
SUBSTRATES;
SURFACE PHENOMENA;
THERMAL EFFECTS;
THERMAL GRADIENTS;
CROOKES CANTILEVER;
KNUDSEN FORCES;
MICROCANTILEVER;
MICROSCALE;
THERMAL TRANSPIRATION;
BORON;
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EID: 0038059080
PISSN: 00319007
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (96)
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References (30)
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