Surface morphology and optical properties of magnetron - sputtered ultrathin Al films

Vacuum

Volumn 84, Issue 6, 2010, Pages 828-832

  Sun, Zhaoqi ^a   Cao, Chunbin ^a,b   Cao, Ling ^a   Liang, Ping ^a   Huang, Xingfa ^a   Song, Xueping ^a,b  

^a ANHUI UNIVERSITY   (China)

^b BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

Author keywords

DC magnetron sputtering; Morphology; Optical properties; Ultrathin Al films

Indexed keywords

ABSORPTANCE; AL FILMS; AVERAGE GRAIN SIZE; CONTINUOUS FILMS; CRITICAL THICKNESS; DC MAGNETRON SPUTTERING; GLASS SUBSTRATES; INTER-BAND TRANSITION; INTERNAL STRESS; PEAK POSITION; QUANTUM SIZE EFFECTS; ULTRA-THIN;

ALUMINUM; MAGNETIC FILMS; MAGNETRONS; METALLIC FILMS; MORPHOLOGY; OPTICAL PROPERTIES; SURFACE ROUGHNESS; ULTRATHIN FILMS;

OPTICAL FILMS;

EID: 74649084747     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.11.002     Document Type: Article

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