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Volumn 468, Issue 15-20, 2008, Pages 2004-2008
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Optimum deposition condition of Nb/Al multilayers for large-scale array detectors with superconducting tunnel junctions
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Author keywords
Detector; Mass spectroscopy; Morphology; Superconducting tunnel junction; Zero stress film
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Indexed keywords
CRYSTALLOGRAPHY;
ELECTRIC CONDUCTIVITY;
MASS SPECTROMETRY;
OPTICAL DESIGN;
SUPERCONDUCTING DEVICES;
SUPERCONDUCTIVITY;
TUNNELS;
ARRAY DETECTORS;
DETECTOR;
FABRICATION PROCESSES;
FILM SURFACES;
LAYER STRUCTURES;
MASS SPECTROSCOPY;
MORPHOLOGY;
OPTIMUM DEPOSITION;
SUPERCONDUCTING TUNNEL JUNCTION;
SUPERCONDUCTING TUNNEL JUNCTIONS;
TIME-OF-FLIGHT MASS SPECTROSCOPY;
ZERO STRESS FILM;
TUNNEL JUNCTIONS;
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EID: 50349091941
PISSN: 09214534
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physc.2008.05.283 Document Type: Article |
Times cited : (5)
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References (14)
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