Application of aluminum films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors

Sensors and Actuators, A: Physical

Volumn 71, Issue 3, 1998, Pages 161-166

  Stankevič, Voitech ^a   Šimkevičius, Česlovas ^a  

^a CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

Aluminum films; Piezoresistive pressure sensors; Temperature compensation; Temperature sensors

Indexed keywords

ALUMINUM; ELECTRIC RESISTANCE; ETCHING; METALLIC FILMS; NETWORKS (CIRCUITS); PIEZOELECTRIC TRANSDUCERS; PRESSURE TRANSDUCERS; RESISTORS; THIN FILM DEVICES;

ALUMINUM THIN FILM RESISTORS; PIEZORESISTIVE PRESSURE SENSORS; TEMPERATURE SENSORS;

SILICON SENSORS;

EID: 0032308176     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00178-2     Document Type: Article

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