Pinholes in Al thin films: Their effects on TFT characteristics and a taguchi method analysis of their origins

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 606-613

  Takatsuji, Hiroshi ^a   Arai, Toshiaki ^a  

^a IBM JAPAN LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000100388     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00323-7     Document Type: Article

References (7)

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6. Dingwall RB, Duell MJ. Taguchi method optimization of a sensor system. ASQC Quality Congress Transactions 1989:710-8.
7. Phadke MS. Quality engineering using robust design. Englewood Cliffs, NJ: Prentice-Hall, 1989. p. 291.