Nanolayer CrNx/WNy coatings used on micro drills for machining of printed circuit boards

Journal of Materials Processing Technology

Volumn 210, Issue 4, 2010, Pages 660-668

  Yao, S H ^a   Su, Y L ^b   Kao, W H ^c   Cheng, K W ^b   Su, C T ^d  

^a CHANG JUNG CHRISTIAN UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

^d NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

Chromium nitride; DC UBM sputtering; Micro drilling; Nanolayer coatings; Tungsten nitride

Indexed keywords

AFM; CHROMIUM NITRIDE; CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING; CRN COATING; CUTTING PERFORMANCE; DEPOSITION SYSTEMS; ION PLATING SYSTEMS; MACHINING TEST; MICRO DRILLING; MICRO DRILLS; MODULATION PERIOD; NANO LAYERS; NANOLAYER COATING; SEM; TEM; THICKNESS HOLE; TUNGSTEN NITRIDE; XRD;

CHROMIUM; CUTTING TOOLS; DRILLING; DRILLS; ION IMPLANTATION; MACHINE TOOLS; MACHINING; MONOLAYERS; NANOHARDNESS; NITRIDES; OIL WELL DRILLING; PLATING; PRINTED CIRCUIT BOARDS; PRINTED CIRCUIT MANUFACTURE; TARGETS; TUNGSTEN; TUNGSTEN COMPOUNDS;

CHROMATE COATINGS;

EID: 74349127552     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2009.12.001     Document Type: Article

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