Mechanical properties of hard chromium tungsten nitride coatings

Surface and Coatings Technology

Volumn 125, Issue 1-3, 2000, Pages 179-184

  Hones, P ^a   Consiglio, R ^b   Randall, N ^b   Leacutevy, F ^a  

^a EPFL   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

Chromium nitride; Mechanical properties; Ternary compound; Transition metal nitride; Tungsten nitride

Indexed keywords

CHROMIUM COMPOUNDS; GLASS; HARDNESS; LOAD TESTING; NITRIDES; OXIDATION; SILICON WAFERS; SPUTTER DEPOSITION; STEEL; STRESS ANALYSIS; TUNGSTEN COMPOUNDS; WEAR RESISTANCE;

CHROMIUM TUNGSTEN NITRIDE; HARD COATINGS; MULTI-PASS SCRATCH TESTS;

PROTECTIVE COATINGS;

CERAMIC COATING; HARDNESS; MICROSTRUCTURE; WEAR RESISTANCE;

EID: 0034105541     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00541-1     Document Type: Conference Paper

References (18)

1. Holleck H. J. Vac. Sci. Technol. A. 4:1986;2661.
2. Sundgren J.-E., Hentzell H.T.G. J. Vac. Sci. Technol. A. 4:1986;2259.
3. Milosev I., Navinsek B., Strehblow H.-H. Scientific Series of the International Bureau. Vol. 37:1995;1 Forschungszentrum Jülich GmbH.
4. Swadzba L., Maciejny A., Formanek B., Liberski P., Podolski P., Mendala B., Gabriel H., Poznanska A. Surf. Coat. Technol. 78:1996;137.
5. Panjan P., Navinsek B., Cvelbar A., Zalar A., Milosev I. Thin Solid Films. 282:1996;298.
6. Park B.L., Ko D.H., Kim Y.S., Ha J.M., Park Y.W., Lee S.I., Lee H.D., Lee M.B., Chung U.I., Koh Y.B., Lee M.Y. J. Electron. Mater. 26:1997;L1.
7. Takeyama M., Noya A. Jpn. J. Appl. Phys. 36:1997;2261.
8. Uekubo M., Oku T., Nii K., Murakami M., Takahiro K., Yamaguchi S., Nakano T., Ohta T. Thin Solid Films. 286:1996;170.
9. Hones P., Sanjinés R., Lévy F., Shojaei O. J. Vac. Sci. Technol. A. 17:1999;1024.
10. Hones P., Sanjinés R., Lévy F. Thin Solid Films. 332:1998;240.
11. Luthier R., Lévy F., Jotterand H. Proc. 7th Int. Conf. Ion and Plasma Assisted Techniques :1989;37 CEP Consultants, Edinburgh.
12. Thornton J.A. Ann. Rev. Mater. Sci. 7:1977;239.
13. Cullity B.D. Elements of X-ray diffraction. 2nd Edition :1978;447 Addison-Wesley, Reading, MA.
14. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
15. Guinier A. X-ray Diffraction. 1963;143 W. H. Freeman, San Francisco, CA.
16. Hones P., Sanjinés R., Lévy F. Surf. Coat. Technol. 94/95:1997;398.
17. Chiba Y., Omura T., Ichimura H. J. Mater. Res. 8:1993;1109.
18. Grant W.K., Loomis C., Moore J.J., Olson D.L., Mishra B., Perry A.J. Surf. Coat. Technol. 86/87:1996;788.