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Volumn 193, Issue 1-3 SPEC. ISS., 2005, Pages 372-374

Effects of nitrogen concentration on microstructures of WNX films synthesized by cathodic arc method

Author keywords

Cathodic arc method; Micro hardness; Microstructure; Tungsten nitride

Indexed keywords

CATHODES; CRYSTAL STRUCTURE; MICROHARDNESS; MICROSTRUCTURE; NITROGEN; PRESSURE EFFECTS; SURFACE ROUGHNESS; THIN FILMS;

CATHODIC ARC METHOD; NITROGEN CONCENTRATION; NITROGEN FLOW; TUNGSTEN NITRIDE FILMS;

TUNGSTEN COMPOUNDS;

CATHODIC ARC PLASMA DEPOSITION;

EID: 13844254996 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.08.116 Document Type: Article

Times cited : (52)

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