메뉴 건너뛰기




Volumn 57, Issue 1, 2010, Pages 46-51

Theoretical analysis of SAW propagation characteristics in (100) oriented AlN/diamond structure

Author keywords

[No Author keywords available]

Indexed keywords

AL ELECTRODE; ALN FILMS; COUPLING COEFFICIENT; DUPLEXERS; ELECTRICAL INTERFACE; PROPAGATION CHARACTERISTICS; RF FILTERS; SIMULATION RESULT; THIN METALS;

EID: 73649113822     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2010.1377     Document Type: Conference Paper
Times cited : (14)

References (32)
  • 2
    • 0031146038 scopus 로고    scopus 로고
    • Surface acoustic wave characteristics of a ZnO/quartz substrate structure having a large electromechanical coupling factor and a small temperature coefficient
    • Feb.
    • M. Kadota, "Surface acoustic wave characteristics of a ZnO/quartz substrate structure having a large electromechanical coupling factor and a small temperature coefficient," Jpn. J. Appl. Phys., vol.36, pp. 3076-3080, Feb. 1997.
    • (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 3076-3080
    • Kadota, M.1
  • 3
    • 0027591541 scopus 로고
    • Propagation characteristics of surface acoustic waves in ZnO/LiNbO3 structures
    • Mar.
    • K. Nakamura and T. Hanaoka, "Propagation characteristics of surface acoustic waves in ZnO/LiNbO3 structures," Jpn. J. Appl. Phys., vol.32, pp. 2333-2336, Mar. 1993.
    • (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 2333-2336
    • Nakamura, K.1    Hanaoka, T.2
  • 4
    • 0036655975 scopus 로고    scopus 로고
    • Characterization of AlN films on Y-128° LiNbO3 by surface acoustic wave measurement
    • Jul.
    • S. Wu, Y. C. Chen, and Y. S. Chang, "Characterization of AlN films on Y-128° LiNbO3 by surface acoustic wave measurement," Jpn. J. Appl. Phys., vol.41, pp. 4605-4608, Jul. 2002.
    • (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 4605-4608
    • Wu, S.1    Chen, Y.C.2    Chang, Y.S.3
  • 5
    • 67849086761 scopus 로고    scopus 로고
    • Propagation characteristics of surface acoustic waves in AlN/128° Y-X LiNbO3 structures
    • art. no. 041406 Apr.
    • R. Ro, R. Lee, S. Wu, Z. X. Lin, and M. S. Lee, "Propagation characteristics of surface acoustic waves in AlN/128° Y-X LiNbO3 structures," Jpn. J. Appl. Phys., vol.48, art. no.041406, Apr. 2009.
    • (2009) Jpn. J. Appl. Phys. , vol.48
    • Ro, R.1    Lee, R.2    Wu, S.3    Lin, Z.X.4    Lee, M.S.5
  • 6
    • 42949136578 scopus 로고    scopus 로고
    • Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography
    • Oct.
    • F. Benedic, M. B. Assouar, P. Kirsh, D. Moneger, O. Brinza, O. Elmazria, P. Alnot, and A. Gicquel, "Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography," Diam. Relat. Mater., vol.17, pp. 804-808, Oct. 2007.
    • (2007) Diam. Relat. Mater. , vol.17 , pp. 804-808
    • Benedic, F.1    Assouar, M.B.2    Kirsh, P.3    Moneger, D.4    Brinza, O.5    Elmazria, O.6    Alnot, P.7    Gicquel, A.8
  • 7
    • 0037805692 scopus 로고    scopus 로고
    • Surface acoustic wave propagation characteristics of aluminum nitride thin films grown on polycrystalline diamond
    • Jun.
    • G. F. Iriarte, "Surface acoustic wave propagation characteristics of aluminum nitride thin films grown on polycrystalline diamond," J. Appl. Phys., vol.93, pp. 9604-9609, Jun. 2003.
    • (2003) J. Appl. Phys. , vol.93 , pp. 9604-9609
    • Iriarte, G.F.1
  • 9
    • 33744806057 scopus 로고    scopus 로고
    • 5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography
    • May.
    • P. Kirsch, M. B. Assouar, O. Elmazria, V. Mortet, and P. Alnot, "5 GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography," Appl. Phys. Lett., vol.88, pp. 223504-223505, May. 2006.
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 223504-223505
    • Kirsch, P.1    Assouar, M.B.2    Elmazria, O.3    Mortet, V.4    Alnot, P.5
  • 10
    • 54749097526 scopus 로고    scopus 로고
    • Rayleigh surface acoustic wave modes of IDT/(100) AlN/(111) diamond
    • art. no.064919 Sep.
    • S. Wu, R. Ro, Z. X. Lin, and M. S. Lee, "Rayleigh surface acoustic wave modes of IDT/(100) AlN/(111) diamond," J. Appl. Phys., vol.104, art. no.064919, Sep. 2008.
    • (2008) J. Appl. Phys. , vol.104
    • Wu, S.1    Ro, R.2    Lin, Z.X.3    Lee, M.S.4
  • 11
    • 62149098752 scopus 로고    scopus 로고
    • High velocity shear horizontal surface acoustic wave modes of interdigital transducer/(100) AlN/(111) diamond
    • art. no.092903 Mar.
    • S. Wu, R. Ro, Z. X. Lin, and M. S. Lee, "High velocity shear horizontal surface acoustic wave modes of interdigital transducer/(100) AlN/(111) diamond," Appl. Phys. Lett., vol.94, art. no.092903, Mar. 2009.
    • (2009) Appl. Phys. Lett. , vol.94
    • Wu, S.1    Ro, R.2    Lin, Z.X.3    Lee, M.S.4
  • 12
    • 0036508299 scopus 로고    scopus 로고
    • Preparation of AlN and LiNbO3 thin films on diamond substrates by sputtering method
    • Mar.
    • M. Ishihara, T. Nakamura, F. Kokai, and Y. Koga, "Preparation of AlN and LiNbO3 thin films on diamond substrates by sputtering method," Diam. ReL. Mater., vol.11, pp. 408-412, Mar. 2002.
    • (2002) Diam. ReL. Mater. , vol.11 , pp. 408-412
    • Ishihara, M.1    Nakamura, T.2    Kokai, F.3    Koga, Y.4
  • 13
    • 0032022746 scopus 로고    scopus 로고
    • Control of preferential orientation of AlN films prepared by the reactive sputtering method
    • Mar.
    • M. Ishihara, S. J. Li, H. Yumoto, K. Akashi, and Y. Ide, "Control of preferential orientation of AlN films prepared by the reactive sputtering method," Thin Solid Films, vol.316, pp. 152-157, Mar. 1998.
    • (1998) Thin Solid Films , vol.316 , pp. 152-157
    • Ishihara, M.1    Li, S.J.2    Yumoto, H.3    Akashi, K.4    Ide, Y.5
  • 15
    • 84866920314 scopus 로고
    • A method for estimating optical crystal cuts and propagation directions for excitation of piezoelectric surface wave
    • Oct.
    • J. J. Campbell and W. R. Jones, "A method for estimating optical crystal cuts and propagation directions for excitation of piezoelectric surface wave," IEEE Trans. Sonics Ultrason., vol.15, pp. 209-217, Oct. 1968.
    • (1968) IEEE Trans. Sonics Ultrason. , vol.15 , pp. 209-217
    • Campbell, J.J.1    Jones, W.R.2
  • 17
    • 0025519596 scopus 로고
    • Matrix methods applied to acoustic waves in multilayers
    • Nov.
    • E. L. Adler, "Matrix methods applied to acoustic waves in multilayers," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol.37, pp. 485-490, Nov. 1990.
    • (1990) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.37 , pp. 485-490
    • Adler, E.L.1
  • 22
    • 54949085068 scopus 로고    scopus 로고
    • Radio frequency surface acoustic wave filter having narrow bandwidth and excellent temperature characteristic
    • May
    • T. Murata, M. Kadota, T. Nakao, and K. Matsuda, "Radio frequency surface acoustic wave filter having narrow bandwidth and excellent temperature characteristic," Jpn. J. Appl. Phys., vol.47, pp. 4101-4103, May 2008.
    • (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 4101-4103
    • Murata, T.1    Kadota, M.2    Nakao, T.3    Matsuda, K.4
  • 23
    • 33744475857 scopus 로고    scopus 로고
    • Low-loss and constant-group-delay surface acoustic wave filters employing Cu-based resonant single-phase unidirectional transducers
    • May.
    • H. Li, J. Wen, K. Y. Hashimoto, T. Omori, and M. Yamaguchi, "Low-loss and constant-group-delay surface acoustic wave filters employing Cu-based resonant single-phase unidirectional transducers," Jpn. J. Appl. Phys., vol.45, pp. 4655-4657, May. 2006.
    • (2006) Jpn. J. Appl. Phys. , vol.45 , pp. 4655-4657
    • Li, H.1    Wen, J.2    Hashimoto, K.Y.3    Omori, T.4    Yamaguchi, M.5
  • 25
    • 34250318933 scopus 로고    scopus 로고
    • SAW substrate for duplexer with excellent temperature characteristics and large reflection coefficient realized by using flattened SiO2 film and thick heavy metal film
    • Jun.
    • M. Kadota, T. Nakao, N. Taniguchi, E. Takata, M. Mimura, K. Nishiyama, T. Hada, and T. Komura, "SAW substrate for duplexer with excellent temperature characteristics and large reflection coefficient realized by using flattened SiO2 film and thick heavy metal film," in Proc. IEEE MTT-S Int. Microwave Symp., pp. 382-385, Jun. 2006.
    • (2006) Proc. IEEE MTT-S Int. Microwave Symp. , pp. 382-385
    • Kadota, M.1    Nakao, T.2    Taniguchi, N.3    Takata, E.4    Mimura, M.5    Nishiyama, K.6    Hada, T.7    Komura, T.8
  • 26
    • 34047268327 scopus 로고    scopus 로고
    • FEM modeling of AlN/diamond surface acoustic waves device
    • Jan.
    • L. L. Brizoual and O. Elmazria, "FEM modeling of AlN/diamond surface acoustic waves device," Diamond Related Materials, vol.16, pp. 987-990, Jan. 2007.
    • (2007) Diamond Related Materials , vol.16 , pp. 987-990
    • Brizoual, L.L.1    Elmazria, O.2
  • 28
    • 0030382436 scopus 로고    scopus 로고
    • Free software products for simulation and design of surface acoustic wave and surface transverse wave devices
    • Oct.
    • K. Y. Hashimoto and M. Yamaguchi, "Free software products for simulation and design of surface acoustic wave and surface transverse wave devices," in Proc. IEEE Ultrasonics Symp., Oct. 1999, pp. 300-307.
    • (1999) Proc. IEEE Ultrasonics Symp. , pp. 300-307
    • Hashimoto, K.Y.1    Yamaguchi, M.2
  • 30
    • 40849116557 scopus 로고    scopus 로고
    • Analysis of dispersive electroacoustic coupling structures for application to gigahertz-band, temperature-compensated AlN-based acoustic devices
    • art. no.103501 Mar.
    • C. Caliendo, "Analysis of dispersive electroacoustic coupling structures for application to gigahertz-band, temperature-compensated AlN-based acoustic devices," Appl. Phys. Lett., vol.92, art. no.103501, Mar. 2008.
    • (2008) Appl. Phys. Lett. , vol.92
    • Caliendo, C.1
  • 31
    • 0035729774 scopus 로고    scopus 로고
    • Analysis of periodic structures for BAW and SAW resonators
    • Nov.
    • Y. K. Yong, "Analysis of periodic structures for BAW and SAW resonators," in Proc. IEEE Ultrasonics Symp., Nov. 2001, pp. 781-790.
    • (2001) Proc. IEEE Ultrasonics Symp. , pp. 781-790
    • Yong, Y.K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.