Surface acoustic wave characteristics of a ZnO/quartz substrate structure having a large electromechanical coupling factor and a small temperature coefficient

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 5 SUPPL. B, 1997, Pages 3076-3080

  Kadota, Michio ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

Coupling factor; Quartz; SAW; TCF; ZnO

Indexed keywords

ELECTROMECHANICAL COUPLING FACTOR; TEMPERATURE COEFFICIENT OF FREQUENCY (TCF);

BANDWIDTH; QUARTZ; SUBSTRATES; THERMAL EFFECTS; ZINC OXIDE;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0031146038     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.3076     Document Type: Article

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