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Volumn 41, Issue 7 A, 2002, Pages 4605-4608
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Characterization of AlN films on Y-128° LiNbO3 by surface acoustic wave measurement
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Author keywords
C axis oriented; SAW; Sputtering; AlN; Y 128 LiNbO3
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Indexed keywords
ACOUSTIC PROPERTIES;
ACOUSTIC SURFACE WAVE DEVICES;
ACOUSTIC TRANSDUCERS;
ALUMINUM NITRIDE;
CRYSTAL ORIENTATION;
ELECTRODES;
LITHIUM NIOBATE;
MAGNETRON SPUTTERING;
PIEZOELECTRIC MATERIALS;
SUBSTRATES;
THERMODYNAMIC STABILITY;
X RAY DIFFRACTION ANALYSIS;
ALUMINUM NITRIDE FILM;
ELECTROMECHANICAL COUPLING;
PIEZOELECTRIC SUBSTRATE;
RADIO FREQUENCY MAGNETRON SPUTTERING;
SURFACE ACOUSTIC WAVE MEASUREMENT;
THIN FILMS;
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EID: 0036655975
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.41.4605 Document Type: Article |
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Times cited : (17)
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References (10)
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