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Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 987-990
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FEM modeling of AlN/diamond surface acoustic waves device
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Author keywords
AIN; Diamond; FEM; SAW
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Indexed keywords
COMPUTER SIMULATION;
DIAMONDS;
ELASTIC WAVES;
FINITE ELEMENT METHOD;
PIEZOELECTRIC DEVICES;
PENETRATION DEPTH;
SPATIAL PERIODICITY;
STRUCTURE ADMITTANCE;
ACOUSTIC SURFACE WAVE DEVICES;
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EID: 34047268327
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2007.01.002 Document Type: Article |
Times cited : (26)
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References (13)
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