Performance optimization and mechanical modeling of uniaxial piezoresistive microaccelerometers

Microsystem Technologies

Volumn 16, Issue 3, 2010, Pages 461-476

  Cortés Pérez, Angel R ^a   Herrera May, Agustin Leobardo ^a,b   Aguilera Cortés, Luz A ^a   González Palacios, Max A ^a   Torres Cisneros, Miguel ^a  

^a UNIVERSITY OF GUANAJUATO   (Mexico)

^b UNIVERSIDAD VERACRUZANA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEX OPTIMIZATION METHOD; CONSUMER APPLICATIONS; FAILURE THEORIES; FE MODEL; FINITE ELEMENT MODELS; GEOMETRICAL DIMENSIONS; HIGH SENSITIVITY; MATERIAL RUPTURE; MECHANICAL BEHAVIOR; MECHANICAL MODELING; MICRO-ACCELEROMETERS; NORMAL STRESS; OBJECTIVE FUNCTIONS; OPTIMIZATION MODELS; PERFORMANCE OPTIMIZATIONS; PIEZO-RESISTIVE; PROGRAMMING ALGORITHMS; RAYLEIGH METHOD; SAFE OPERATION; STRESS CONSTRAINTS;

CONSTRAINT THEORY; MATHEMATICAL MODELS; OPTIMIZATION;

ACCELEROMETERS;

EID: 73349120241     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0942-y     Document Type: Article

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