Performance enhancement of a silicon MEMS piezoresistive single axis accelerometer with electroplated gold on a proof mass

Journal of Micromechanics and Microengineering

Volumn 19, Issue 2, 2009, Pages

  Ravi Sankar, A ^a   Lahiri, S K ^a   Das, S ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ALUMINA; BORON; BRIDGE CIRCUITS; DISSIMILAR METALS; ELECTROCHEMISTRY; GALVANIZING; GOLD; MEMS; MICROELECTROMECHANICAL DEVICES; SULFITE PROCESS;

ALUMINUM METALS; BULK- MICROMACHINING; ELECTROPLATED GOLDS; ELECTROPLATING PROCESS; FABRICATED DEVICES; FIXED ENDS; G ACCELERATIONS; GALVANIC CORROSIONS; OFF-AXIS; PERFORMANCE ENHANCEMENTS; PICK-UP; PIEZO-RESISTIVE; PIEZO-RESISTORS; PROOF MASS; SEED LAYERS; SHADOW MASK TECHNIQUES; SILICON MEMS; SINGLE-AXIS; WHEATSTONE BRIDGES;

ELECTROPLATING;

EID: 61849147453     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/2/025008     Document Type: Article

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