Structural parameter sensitivity analysis of cantilever- and bridge-type accelerometers

Sensors and Actuators, A: Physical

Volumn 89, Issue 3, 2001, Pages 197-205

  Kovács, Ádám ^a   Vízváry, Zsolt ^a  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

Accelerometers; Frequency analysis; Piezoresistive and capacitive sensors; Sensitivity analysis

Indexed keywords

CANTILEVER BEAMS; CANTILEVER BRIDGES; EIGENVALUES AND EIGENFUNCTIONS; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; SILICON SENSORS; STRUCTURAL ANALYSIS;

CAPACITIVE ACCELEROMETERS; EIGENFREQUENCY; MONOLITHIC PIEZORESISTIVE ACCELEROMETERS;

ACCELEROMETERS;

EID: 0035871489     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00553-7     Document Type: Article

References (11)

1. Sensors for measuring acceleration
2. Resonant sensors
3. Design optimization for cantilever-type accelerometers
4. Electrostatic forces and their effects on capacitive mechanical sensors
5. Silicon as a mechanical material
6. Piezoresistive sensors