Lagrange's formalism for modeling of a triaxial microaccelerometer with piezoelectric thin-film sensing

IEEE Sensors Journal

Volumn 4, Issue 4, 2004, Pages 455-463

  Zhu, Meiling ^a   Kirby, Paul ^a   Lim, Ming Yu ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Model; Piezoelectric thin film sensing; Triaxial microaccelerometer

Indexed keywords

ACCELEROMETERS; ELECTRON TUNNELING; MATHEMATICAL MODELS; MICROMACHINING; OPTIMIZATION; PIEZOELECTRIC DEVICES; THIN FILMS;

CAPACITIVE ACCELEROMETERS; SILICON MICROSENSORS; TRIAXIAL MICROACCELEROMETERS; TUNNELING CURRENTS;

THIN FILM DEVICES;

EID: 3142779149     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2004.830948     Document Type: Article

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