Piezoresistive accelerometers for MCM package

Journal of Microelectromechanical Systems

Volumn 11, Issue 6, 2002, Pages 794-801

  Plaza, José Antonio ^a   Collado, Ana ^a   Cabruja, Enric ^a   Esteve, Jaume ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

BESOI technology; MCM D package; Piezoresistive accelerometers; Smart MEMS

Indexed keywords

ACCELEROMETERS; CANTILEVER BEAMS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MULTICARRIER MODULATION; PHOTOLITHOGRAPHY; SENSITIVITY ANALYSIS; SILICON;

PIEZORESISTIVE ACCELEROMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036902776     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.805213     Document Type: Article

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