A resonant magnetic field microsensor with high quality factor at atmospheric pressure

Journal of Micromechanics and Microengineering

Volumn 19, Issue 1, 2009, Pages

  Herrera May, A L ^a,b   Garcia Ramirez P J ^a   Aguilera Cortes L A ^b   Martinez Castillo J ^a   Sauceda Carvajal, A ^a   Garcia Gonzlez L ^a   Figueras Costa, E ^c  

^a UNIVERSIDAD VERACRUZANA   (Mexico)

^b UNIVERSITY OF GUANAJUATO   (Mexico)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; BRIDGE CIRCUITS; LORENTZ FORCE; MAGNETIC FIELD EFFECTS; MAGNETISM; NATURAL FREQUENCIES; PLATES (STRUCTURAL COMPONENTS); Q FACTOR MEASUREMENT;

FINITE-ELEMENT METHODS; GEOMETRICAL CONFIGURATIONS; HIGH-QUALITY FACTORS; MAGNETIC SENSITIVITIES; MAXIMUM DEFLECTIONS; MECHANICAL RESPONSE; NOISE VOLTAGES; P TYPES; PIEZO-RESISTORS; POWER CONSUMPTION; RESONANT DEVICES; RESONANT FREQUENCIES; ROOT-MEAN SQUARES; SINUSOIDAL EXCITATIONS; VACUUM PACKAGING; VON-MISES STRESS; WHEATSTONE BRIDGES;

MICROSENSORS;

EID: 62649155731     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/1/015016     Document Type: Article

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