Nonlinearity and hysteresis of resonant strain gauges

Journal of Microelectromechanical Systems

Volumn 7, Issue 1, 1998, Pages 122-126

  Gui, Chengqun ^a,d,e   Legtenberg, Rob ^a,b   Tilmans, Harrie A C ^{a,c,e,f,g,h,i,j,k,l,m}   Fluitman, Jan H J ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b Hollandse Signaal Apparaten   (Netherlands)

^c CP Clare NV   (Belgium)

^d TSINGHUA UNIVERSITY   (China)

^e UNIVERSITY OF TWENTE   (Netherlands)

^f BOSTON UNIVERSITY   (United States)

^g UNIVERSITY OF WISCONSIN MADISON   (United States)

^h Controls Res Dept Johnson C ^*  (United States)

ⁱ FOM INSTITUTE DIFFER   (Netherlands)

^j UNIVERSITY OF LEUVEN   (Belgium)

^k CP Clare Corporation   (Belgium)

^l IEEE

^m Frequency Control Society

more..

Author keywords

Figure of merit; Hysteresis; Nonlinearity; Quality factor; Resonant strain gauges

Indexed keywords

CONTROL NONLINEARITIES; ELECTROSTATIC DEVICES; HYSTERESIS; MICROMACHINING; NATURAL FREQUENCIES; RESONATORS; VIBRATION MEASUREMENT;

DUFFING'S EQUATION; RESONANT MICROBRIDGES; RESONANT STRAIN GAUGES;

STRAIN GAGES;

EID: 0032022708     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.661394     Document Type: Article

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