Improved Operation of Micromechanical Comb-Drive Actuators through the Use of a New Angled Comb Finger Design

Journal of Intelligent Material Systems and Structures

Volumn 9, Issue 4, 1998, Pages 283-290

  Rosa, Michel A ^a,b   Dimitrijev, Sima ^a   Harrison, H Barry ^a  

^a GRIFFITH UNIVERSITY   (Australia)

^b PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMB FINGERS;

ELECTROSTATIC DEVICES; MICROACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032035519     PISSN: 1045389X     EISSN: None     Source Type: Journal    
DOI: 10.1177/1045389X9800900406     Document Type: Article

References (19)

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