Electrostatic resonator with second superharmonic resonance

Sensors and Actuators, A: Physical

Volumn 64, Issue 3, 1998, Pages 273-279

  Jin, Zhonghe ^a   Wang, Yuelin ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Electrostatic; Resonators; Side wall doping; Silicon; Superharmonic resonance

Indexed keywords

CIRCUIT RESONANCE; CROSSTALK; DOPING (ADDITIVES); ELECTRODES; ELECTROSTATIC DEVICES; INTERFERENCE SUPPRESSION; MICROMACHINING; SIGNAL TO NOISE RATIO; SILICA; SINGLE CRYSTALS;

SECOND SUPERHARMONIC RESONANCE (SSHR); SIDE WALL DOPING;

RESONATORS;

EID: 0031697692     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01630-0     Document Type: Article

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