Reducing the macroparticle content of cathodic arc evaporated TiN coatings

Surface and Coatings Technology

Volumn 183, Issue 2-3, 2004, Pages 283-294

  Harris, S G ^a   Doyle, E D ^a   Wong, Y C ^a   Munroe, P R ^b   Cairney, J M ^b   Long, J M ^c  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

^c DEAKIN UNIVERSITY   (Australia)

Author keywords

Cathodic arc evaporation; Macroparticles; PVD; Roughness; Titanium nitride

Indexed keywords

COATINGS; EVAPORATION; IONIZATION; METAL CUTTING; PHYSICAL VAPOR DEPOSITION; TITANIUM NITRIDE;

CATHODIC ARC EVAPORATION (CAE); DROPLETS; GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY (GD OES); MACROPARTICLES;

SURFACE CHEMISTRY;

COATING;

EID: 2442509813     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.08.086     Document Type: Article

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